30

13.5 21 24 31 41 4.5 5 6 7.5 7 8 11 14 17.5 19.5 20 25 8 10 14 18 1.25 1.25 1.5 1.5 44 49.5 60 74.5 20 25, 32 40 50, 63 Semi-standard type Pneumatic: to 1 MPa (mm) Maximum thread depth P Allowable eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

.C.D.24 (Mounting thread) 17.5 20 MDHR3-10E Port Location 120 120 B 40 8.5 M3 x 0.5 Finger opening port M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port M3 x 0.5 Finger closing port 9.5 25 25 C 3 x 3 depth 6 +0.02 0 (A, B, C common view) 44 MHZ 29 6 x M3 x 0.5 thread depth 6 (A, B, C common view) 9h9 0 0.036 MHF 15 4.7 9.7 1 2 MHL 5.8 3 4.7 2 x 3 MHR MHR (36.5) 33.5 MHK 19.5 2 x

E,R.L.

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?

MHL2

50 70 Note 1) J dimension is at fully closed.

PFxx-OMS0001CN

2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [F 3] [ rES] [ 1. 0] 1 42 [F10] [ SUb] [ oUt] 43 [F20] [ inP] 3 [REACUM] 47 4 [ oFF] OFF 48 [F22] [ FrE] [F30] [SAvE] [ oFF] 49 [ PoS] [ HoR] 50 [ PrS] [ Mid] 0.4 MPa0.6 MPa [F31] [F80] [ dSP] OFF [ oN]ON 51 [F81] [ Pin] [ oFF] 52 [F82] [LinE] [*] 53 [F90

PFxx-OMP0001CN

1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102) [F 2][oU2]

MHF2

Printed in Japan. 1st printing February, 2002 D-DAD P-80 (D) This catalog is printed on recycled paper with concern for the global environment.

LFE-OMY0008

[F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.

For Water Digital Flow Switch Series PFW

DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106 Model PFW504 PFW520 PFW540 62 78.2 120 1.6 23 50 60 34 2-Port size 4-4.5 34 50 40 48 (43.5) Flow direction 25 Series PFA Dimensions/Remote Type Display Unit for Water PFW3-A Panel mount type Internal circuits and wiring Sensor 41.8 Blue Brown Black N.C. 40.3 40 1 2 3 4 4.3 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2

Oil Filter FH150 Series

(kg) Model FH150-02 FH150-03 FH150-04 1/4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

EXxx-OMQ0015CN

(3)B180(1/2) (1) (2) (3) A B C (EX600-ZT1) -14No.EX-OMQ0015CN SI EX600-S SI 1 /PNP 2 /NPN PN PROFINET No. 1 LED 2 3 (BUS OUT) 4 5 (PCI) 6 MAC 12MACSIMAC 7 8 9 10 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -15No.EX-OMQ0015CN BUS IN BUS OUT 1 TD+ 2 RD+ 3 TD4 RDIP67 -16No.EX-OMQ0015CN LED LED ST(M) PWR PWR(V) SF BF L/A IN BUS IN L/A OUT BUS OUT SI OFF SI ST(M) PWR PWR(

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

VNC

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

KK/KK13

P-80 (D)

JXCx-OMT0030CN

0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V LECOFF 25 - 7CN3: 1 5 4 3 2 1 2 5 4 3 2 1 9 8 7 6 9 8 7 6 3 RXDTXD-P / 4 5 DGND 6 VP 7 8 RXD/TXD-N / 9 PRODIBUS DP 6GK1 500-0FC106ES7 972-0BA12-0XA0 PROFIBUS DP 26 - 8CN1:IF CONT 81 5 (LEC) LEC-CG1-1 LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD c) M12 4pin LEC-CG1b

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Use the appropriate pliers (C-type snap ring mounting tool) for installation and removal of the snap ring. 2. Take precautions even when using the appropriate pliers (C-type snap ring mounting tool). The snap ring may slip off the end of the pliers (C-type snap ring mounting tool) and spring out, causing bodily injury or damage to nearby equipment.

MGP

MGP-A 25 16 25 16 50 2025 50 50 20 1 2 21 22 NBR 23 24 25 63100 26 NBR 27 NBR 28 29 A NBR 30 B NBR 31 C NBR 1625 32100 1663 80100 5 1625 32100 7 8 9 10 11 12 13 16 20100 15 16 17 18 19 3 16 1650 4 6 / (mm) (mm) 16 MGP16-A-PS 50 MGP50-A-PS 20 MGP20-A-PS 63 MGP63-A-PS 25 MGP25-A-PS 80 MGP80-A-PS 32 MGP32-A-PS 100 MGP100-A-PS 40 MGP40-A-PS

PFxx-OMO0004CN

L 1 L/min 1 L LED 3 7 ON (OUT1:OUT2 IP40 AC1000 V 1 50 M (DC500 V ) 050 -1060 () 3585RH() CE(EMC ROHS )ULCSA Rc1/4NPT1/4G1/48 FKMSUS304PPSPBT ()HNBRSiAuGE4F Rc1/4 NPT1/4 70 g 85 g G1/4 115 g 130 g 8 50 g 65 g +45 g +35 g +20 g +15 g DIN +65 g -66No.PF-OMO0004CN-E 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 ZS-33-D AWG26 1.00 mm +