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Welded type, ports (2, 3, 4 ports) and porting configuration (flow direction 2, 3, 4) selectable How to order P.1110, 1112 Further information Optional porting configuration P.1114 Further information Example) Outlet Inlet Face seal fitting (Male) 1/4 Face seal fitting (Female) 3/8 Air operated type Fitting Status Body material Max. operating pressure (MPa) Cv 1) Connections Page Series

F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20] =00 = ON EEPROM 100 +100 OFF GND 30 msec. 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] [-] [F20] -47No.PF-OMM0004-D [F22] 5 V20 mA [F22] [AnA] [AnA][-] [F22] -48No.PF-OMM0004-D OFF ON 5 V 20 mA 10% [F22] -49No.PF-OMM0004-D [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200

80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Note) Consult with P/

NPN) IC 5 V A76H A96V A96 Reed switch Solid state switch Grommet A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F 200 V A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV A93 F9N F9P F9B M9N M9P M9B F9NW F9PW F9BW F9BA Yes Yes 12 V 100 V Relay, PLC 2-wire 24 V Connector 12 V Grommet Diagnostic indication (2-color) 3-wire (NPN) 3-wire

p ClAseies Air Cylinder Fine Lock Model High Intermediate Stopping Accuracy , 3 Types of Locking Mechanisms r Locks in Either Extended or Retracted ', 5 Bore Sizes Available Auto Switch CaPable Direction 4-5 I Product Features . .6 I Ho* To order lf, .7 I Standard Specifications 8-9 ! locf Specifications. ..'

VP RxD/ TxD-N DGND RxD/ TxD-P SHIELD VP Drawing 2 The value of terminating resistor changes with cable specification. This value of terminating resistor is based on type A cable.

ID P. 14-20-55 AMG Max. air flow rate (m3/min (ANR)) AFF Caution AM Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point. With a model that has the maximum flow rate line below the obtained intersecting point, the flow rate will be exceeded, thus leading to a problem such as being unable to satisfy the specifications.

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

(Rc, NPT, G) (Port size) 4 x N through H thread effective depth C I D M E Z A + Stroke B + Stroke L W E M K J 2 x P (Rc, NPT, G) (Port size) 100 Auto switch Minimum lead wire bending radius 10 H thread effective depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J

(The SI unit is provided for use in Japan.) *9 p: For pipe thread type: NPT only *10 : Select with options: E1, E2, E3, E4. 79 A AR20-B to AR60-B Regulator AR20K-B to AR60K-B Regulator with Backflow Function Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

port R1 FU port FB port FA port R1 port P port R3 port R2 port Caution Do not allow foreign matter such as cutting chips inside the cylinder from the ports.

Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult P/A in advance, as this will differ depending on the operating

Wide operating range (double that of other P/A products) enables stable position detection.

Solenoid specifications 5 (R1) 3 (R2) 1 (P) 0.35W (Standard) 0.1W (With power saving circuit, when energized) 4 (A) 2 (B) Power consumption N.O. N.O. Coil rated voltage 12/24VDC 5 (R1) 3 (R2) 1 (P) Flow characteristics 4 (A) 2 (B) Flow characteristics C[dm3/(s.bar)] 0.36 0.32 N.C. N.O. 5 (R1) 3 (R2) v 0.1 0.08 b 0.39 0.33 1 (P) 2-position, single/double 4-position, dual 3 port

Alarm Detection (p.81) in operation manual Card Motor Controller (Step Data Input edition). Caution Ensure the alarm history is cleared only after taking corrective action in response to the alarms.

O Rotate the pin 30" clockwise (when viewed from the rod end) using a wooden or p,astic handle, taking care not to damage the pin or fock unit. Note: Do not hil the pin ao rotaE or the pin could be bent or damaged as a rcsult. Be carclul when pushing the pin a it may be sllppery. O Pressurize the lock release port to 44 PSI (3.1 kg/cm'?) or more.

Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved 06-E533 Issued: June, 2006 D-DNP P-120 (DN) Stainless Steel Speed Controller (Elbow Type) Series ASG Flow Rate and Effective Area Material: Stainless steel 316 Model ASG22F-M5 Tubing O.D.

06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.