High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

Vacuum Pad

Thus, from the formula on the front matter 9, the adsorption response time is as follows: T = (V x 60)/Q = (0.0031 x 60)/1.7 = 0.109 seconds = 109 msec It is possible to confirm that the calculation result satisfies the required specification of 300 msec. Front matter 15 Model Selection 8 Data #Selection Graph Selection Graph (2) Piping Capacity by Tube I.D.

Refrigerated Air Dryer

Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283 275 498 455 15 270 31 80 230 32 15 240 80 284 42 3/4 355 300

Made to Order Specifications:

Drain Series AFF Size Series AM, AMD, AMH Size 150 Series AFF Size Series AM, AMD, AMG, AMH Size Port size A B Connection A B 239 252 258 284 290 2B 80 1/4 , 3/8 1/8 , 1/4 , 3/8 450 550 650 850 256 260 300 300 349 380 496.5 11B 22B 37B 75B 240 3/4B, FF , 10K 1B, FF , 10K 1 B, FF , 10K 2B, FF , 10K 80 250 4B 1/2 1 2 3/8 , 1/2 3/4 1/2 , 3/4 1 3/4 , 1 1 , 1 1 , 2 80 8B 350 80 305 312 339 80

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

CE2

To use the system in a magnetic field that exceeds this value, use a magnetic material to shield the sensor unit. 63 50 50 40 40 YES 100 200 300 400 500 100 200 300 400 500 NO Does the mounted load exceed the load given in the diagram? Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K.

RHC

Solenoid valve ( ): Effective area [mm2] : Metal : Metal seal Speed controller Composed effective area (mm2) E 64.8 to 67 D 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) G 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F 102.6 to 120 2 Standard type 1 With One-touch fittings C 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) Elbow type 1-A Refer to System

Compact Cylinder

Lateral load Operating pressure: 1 MPa 1000 200 300 500 Stroke Eccentric distance 100 100 Load weight (kg) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 63 Allowable lateral load (N) 50 40 63 1 32 25 20 50 40 10 32 0.1 25 10 100 200 300 500 1000 Maximum piston

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

connector, refer to page 8-30-52. 8-29-1 2 Series CXS Specifications 15 6 10 20 25 32 Bore size (mm) Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Bearing type Air (Non-lube) 1.05 MPa 0.7 MPa 0.1 MPa 0.05 MPa 0.15 MPa 10 to 60C (No freezing) 30 to 600 mm/s 30 to 700 mm/s 30 to 300

CXWM/CXWL

Note3) For 16, 20 and 25, strokes up to 300, and for 32, strokes up to 250 are available as made-to-order. (-XB11) Nil None Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Bore sizes: 10, 15, 20, 25, 32, 40 mm; Stroke lengths: 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke lengths: 500 mm (10 bore), 1000 mm (15 bore), 1500 mm (20 bore), 2000 mm (25, 32 & 40 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

Bore sizes: 25, 32, 40, 50, 63 mm; Stroke lengths: 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke lengths: 4000 mm (25 & 32 bore), 5000 mm (40 bore), 6000 mm (50 & 63 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

Bore sizes: 10, 15, 20, 25, 32 mm; Stroke lengths: 150, 200, 300, 400, 500, 600, 800, 1000 mm; Maximum stroke lengths: 500 mm (10 bore), 750 mm (15 bore), 1000 mm (20 bore), 1200 mm (25 bore), 1500 mm (32 bore); Minimum operating pressure: 0.2 MPa (29 psi); Speed: 70 ~ 300 mm/sec.

Bore sizes: 25, 32, 40, 50, 63 mm; Stroke lengths: 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke lengths: 4000 mm (25 & 32 bore), 5000 mm (40 bore), 6000 mm (50 & 63 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

Bore sizes: 10, 15, 20, 25, 32, 40 mm; Stroke lengths: 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke lengths: 500 mm (10 bore), 1000 mm (15 bore), 1500 mm (20 bore), 2000 mm (25, 32 & 40 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

Bore sizes: 10, 15, 20, 25, 32, 40 mm; Stroke lengths: 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke lengths: 500 mm (10 bore), 750 mm (15 bore), 1000 mm (20 bore), 1500 mm (25, 32 & 40 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

Bore sizes: 10, 15, 20, 25, 32, 40 mm; Stroke lengths: 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke lengths: 500 mm (10 bore), 750 mm (15 bore), 1000 mm (20 bore), 1500 mm (25, 32 & 40 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec

Bore sizes: 10, 15, 20, 25, 32 mm; Stroke lengths: 150, 200, 300, 400, 500, 600, 800, 1000 mm; Maximum stroke lengths: 500 mm (10 bore), 750 mm (15 bore), 1000 mm (20 bore), 1200 mm (25 bore), 1500 mm (32 bore); Minimum operating pressure: 0.2 MPa (29 psi); Speed: 70 ~ 300 mm/sec.

Bore sizes: 25, 32 40, 50, 63 mm; Stroke lengths: 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke length: 1300 mm (25, 32, 40, 50 & 63 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.