SMC Pneumatic Clean Series

13 7 7 7 5 4 4 1/4 1/8 1/8 163 131 129 26-0.033 0 17.5 35.5 32-0.039 0 10 8 M32 x 2 82 36 21.5 41.5 20 Air Cylinder CM2 2122CM2/ 1011Specific Product Precautions Be sure to read before handling.

Compact and Lightweight

)] Vacuum pressure 80 80 100 80 100 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] 60 60 75 60 75 60 Air consumption Suction flow rate 40 40 50 40 50 40 Suction flow rate Vacuum pressure 20 20 25 20 25 20 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 30 40 50 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 60 80 Supply pressure [

EX600-DX_DY_DM_eng

V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24

IR1000/2000/3000

0 !1 !2 !3 !4 !

Dual Speed Controller with One-touch Fitting Series ASD

0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 12 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-15 Series ASD Dimensions

HRX-OM-Q026

Set temperature 40.0 oC 5.0 to 55.0 oC (104.0 oF) (41.0 to 131.0 oF) (-)2 Circulating fluid Monitoring method AL03 discharge temp. 0 0 to 3 rise Monitoring start timer ---(0)3 0 to 600 minutes Range over detection timer 5 5 to 999 seconds 1: Values in F are displayed when SE12 is set to F. 2: Default value when AS03 is set OFF. 3: Default value when AS21 is set to either 2 or 3. 5.22 Alarm

HRX-OM-R028

Temperature unit set status 0= Centigrade (oC) 1= Fahrenheit (oF) 11 Run timer flag Run timer set status 0=Not set 1= Set 12 Stop timer flag Stop timer set status 0= Not set 1=Set 13 Reset after power cut flag Reset after power cut set status 0= Not set 1= Set 14 Anti-freezing flag Anti-freezing set status 0= Not set 1= Set Automatic fluid filling condition 0= Stop 1= Fluid The signal of

SI unit for PROFIBUS DP

No. 1 No. 2 No. 3 No. 4 No. 5 No. 6 No. 7 No. 8 64 32 16 8 4 2 1 1 0 0 0 0 0 0 1 2 0 0 0 0 0 1 0 ADDRESS 3 0 0 0 0 0 1 1 4 0 0 0 0 1 0 0 : : : : : : : : 125 1 1 1 1 1 0 1 CLEAR 0 OUTPUT STATE HOLD 1 The PROFIBUS DP address is binary coded and can be set from 1 to 125 using the 8-element switch. : Factory default setting is Address 1.

HEC_001W-E

P V < 2 3 . 0 C # 2 S V 2 5 . 0 C M O D E 2. Target temperature (no indication on display) Setting range : 10.0 to 60.0 C Min. increment : 0.1 C Indicated content : [SV] : Target temp.(Ex. : 25.0 C) Function : Sets target temperature P V 2 3 . 0 C # 1 S V < 2 5 . 0 C M O D E 3.

MXW

9, @0, @1 Seal kit includes !9, @0, @1.

Modular F.R.L. Units

0 !1 q r e w t i u y o !0 !

C76

0 !1 !2 !3 !4 !5 !6 !7 !

C76

0 !1 !2 !3 !4 !5 !6 !7 !

HRX-OM-M091

0= Centigrade (oC) 1= Fahrenheit (oF) 11 Run timer flag Run timer set status 0= Not set 1= Set 12 Stop timer flag Stop timer set status 0= Not set 1= Set 13 Reset after power failure flag Reset after power failure set status 0= Not set 1= Set 14 Anti-freezing flag Anti-freezing set status 0= Not set 1= Set Automatic fluid filling condition 0= Stop 1= Fluid The signal of the product without

Environment

0 !1 !2 !

Air Slide Table

B side traveling parallelism to A side Weight (g) 65 5.5 65 25 15 15 0.05 mm C side perpendicularity to A side 0.08 mm (0.1 mm) M dimension tolerance RJ Short Stroke Type Specifications W dimension tolerance 0.1 mm Radial clearance (m) 4 to 0 14 to 0 0.1 mm for 75 mm or longer stroke 4 to 0 6 to 0 10 to 0 12 to 0 Shock absorber model RJ1006 RJ1410 RJ0805 Applicable slide table MXQR6 MXQR8

MGP

to 10mm or 0 to 25mm from the full stroke.

Air Slide Table Series MXW

H l D Model Bolt Max. tightening torque (Nm) Depth l (mm) Positioning hole D x H (mm) 5H9 + 0.030 0 depth 4.5 MXW8 1.2 14.8 M3 x 0.5 5H9 + 0.030 0 depth 4.5 MXW12 19.2 M4 x 0.7 2.1 6H9 + 0.030 0 depth 5.5 MXW16 21.5 M5 x 0.8 4.4 6H9 + 0.030 0 depth 5.5 MXW20 M5 x 0.8 30.5 4.4 8H9 + 0.036 0 depth 9 MXW25 36 M6 x 1 7.4 168

Fieldbus System

32 SPR3: 0/16 SPR2: 0/32 SPR4: 0/16 SPR5: 0/32 SPR7: 0/16 SPR6: 0/32 SPR8: 0/16 SDN1: 0/32 SDN3: 0/16 SDN2: 0/32 SDN4: 0/16 EX260 SY SV VQC S0700 125 k/250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage

48

9 t @0 @1 !0 !6 !8 !5 o Component Parts Description No.