AC

0 !

PSxx-OMV0003CN

bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y 1110 0x0456 0 R/W drE () U8 0 Y 0 1(1/10) 1140 0x0474 0 R/W Cut (Zero-cut) U8 0 Y 010 0 0 1.0% 1800 0x0708 0 R/W Eco () U8 0 Y 0oFF 1on Pin () U8 0 Y 0 1 1810 0x0712 0 R/W 1811 0x0713 0 R/W NPin () U16 0 Y 0999 a F32 N 2000 0x07D0 0 R (63 ) 2001 0x07D1 0 R b F32 N 2002 0x07D2 0 R U16 0 N 6163 2003 0x07D3 0 R

Rotary Actuator

CRQ2 +4 0 R o t a MSQ ti o 0 9 n y r a a w n y g e e k f of o MSZ k e e g y n R w a ot r a at n CRQ2X MSQX y o io 9 ti n 0 a ra t +4 0 n o g R e MRQ of k e y w a y 9 +4 0 0 Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

•

-XC~ Special port position 15J n :4 -XC With h.avy duly sc,ape, 0 0 -xcs Heal~~n~230' FI 0 0 ' XC6 Made of .,,'n'ess ste!

Fieldbus system PROFIBUS DP compatible SI unit

3 2 1 0 Byte 0 0 Bit No.

MY1

to 5.6 0 to 6 0 to 11.5 0 to 12 0 to 16 0 to 20 0 to 25 20Stroke adjustment range When exceeding the stroke fine adjustment range: Utilize a made-to-order specifications -X416 and -X417.

LJ1H

100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs above, be sure to use a regenerative absorption unit.

Modular F.R.L. Units

0 !1 q r e w t i y u o !0 !

CL

0 0 0 85 95 110 140 162 170 190 212 51 58 58 71 72 110 110 120 62 74 90 110 130 164 184 204 9-3-14

AC Servo Motor Driver (SSCNET Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) / 0003(LEC-MR-RB-12) Rotation direction selection PA14 0 1 0 (+Counter motors side) (+Counter motors side) Adaptive tuning mode PB01 0 0 0002 0 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter should be changed.

HRX-OM-W002

0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature[] 60Hz 60Hz Circ 60Hz 50Hz Circulating fluid temperature

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Air Cylinder Series CA2

0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 8 10 3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 12.5 11.5 8.5 7.5 6 5 5.5 4 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16 14 9.5 7.5 9 7 6 4 6.5 4.5 4.5 12.5 8 6 10 8 17.5 15.5 16.5 13.5 12.5 17.5 11 10 10.5 9 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 D-A9 and D-A9V types cannot be mounted on 50.

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

ALF400 to 900, ALT-5/-9

F L A N 5 1 . 3 ) 0 8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 /

Thermo-con/Rack Mount Type

supply connector 104 242 379 429 63 Communication connector 0 247 226 206 191 149 148 0 24 0 24 Circulating fluid inlet Rc3/8 Circulating fluid outlet Rc3/8 0 59 326 1.

CM2

7 B 0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Modular F.R.L. Unit

0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC60 AC30 0.25 0.25 Set point Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.15 0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC40 0.25 Set point Outlet pressure MPa 0.2 0.15 0 0

MHZ2/MHZJ2

5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 / 1 1 4 / 1 1 0 0 9 F