Microspeed Cylinder

CUX16-PS Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) M3 Bore size (mm) Rod seal 1 pc. CUX20-PS Gasket 1 pc. CUX25-PS 0.5410% Grease pack (10g) 1 pc. CUX32-PS M4 1.2310% Seals cannot be replaced for 10mm bore size. M5 2.5510% M6 4.0210% 2.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Pin Clamp Cylinder Series CKQ/CLKQ

Hexagon socket head cap screw Round head Phillips screw With spring washer, M3 x 0.5 x 14 L With spring washer, M3 x 0.5 x 16 L Switch mounting fitting Magnetic field resistant auto switch Mounting bracket kit number Items and number of each item Switch mounting bracket x 1 Switch mounting nut x 1 Round head Phillips screw x 1 Hexagon socket head cap screw x 2 Spring washer x 4 BQP1-

Uniaxial Electric Actuator Series LJ1

M1 W 10 50 100 L1 10 30 20 0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3

MXW Series Long Stroke Slide Table

Torque Recommended torque in lbf (N m) Hexagonal wrench width across flats Type Fixing thread size 1.5 5.3 (0.6) MXW 8 M3 x 4 1.5 5.3 (0.6) MXW12 M3 x 4 1.5 MXW16 M3 x 4 5.3 (0.6) 2 MXW20 M4 x 5 7.1 (0.8) 2.5 MXW25 M5 x 6 8.9 (1) 139 MXW Series Long Stroke Slide Table Operation Guide Maximum dynamic load and allowable moments are different depending on work mounting orientation,cylinder

3 Position Cylinder Series RZQ

Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 Manufacture of intermediate strokes BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut Ordering Refer to standard part number and ordering on page 1.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

ZISE80.eng

Danger: Switch ON At normal output Switch OFF Maintenance Time [s] M3 x 5 L M3 x 5 L Operator How to reset the product after a power cut or forcible de-energizing The setting of the product will be retained as it was before a power cut or de-energizing.

EX260-SDN_eng

Designation Contact layout Power supply connector Power supply with load voltage for valves (M12 4-pole plug, A-coded) 3 1 Diagnostic information The technical document states detail diagnostic information can be found on the SMC website (URL http://www.smcworld.com) 2 1 4 Ground terminal Functional earth (M3 screw) 2 +24 V for solenoid valve 5 Output connector Output signal interface for

EX260-SPR-A_eng

M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.

EX500-GPR1A.eng

SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT) Metal body elbow style; Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2; Meter in or meter out; Port sizes: M3, M5, 10-32UNF, 1/8, 1/4, 3/8, 1/2

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT) Metal body elbow style; Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2; Meter in or meter out; Port sizes: M3, M5, 10-32UNF, 1/8, 1/4, 3/8, 1/2

.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)]

.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)]

.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)]

.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)], Sealant: None, Release Button: 1 (Oval Type)

.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)], Sealant: None, Release Button: None, Made to Order: X35 (Body Color: Black; Release Button Color: Orange)

.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)], Sealant: None, Release Button: 1 (Oval Type)

.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)], Sealant: None, Release Button: 1 (Oval Type)