IDX-OM-W019

h) Air Flow Rate (ANR) (Note1) At Expected Outlet Press.Dew Point of 45 F (7.2C) 11 SCFM (19 m3/h) 16 SCFM (27 m3/h) 26 SCFM (45 m3/h) 43 SCFM (74 m3/h) 62 SCFM (106 m3/h) 80 SCFM (136 m3/h) At Expected Outlet Press.Dew Point of 50 F (10C) 12 SCFM (20 m3/h) 17 SCFM (28 m3/h) 28 SCFM (47 m3/h) 45 SCFM (77 m3/h) 65 SCFM (110 m3/h) 86 SCFM (147 m3/h) Operating Pressure 100psig (0.7MPa) Rated

MXS Series Air Slide Table

Axial piping (6) MXS6P 32 Max. 5.6 Operating port 2-M3 x 0.5 12 5.5 11.5 8 Dimensions not indicated are the same as basic type. 55 MXS Series Air Slide Table Dimensions MXS 8 2-M3 X 0.5 thread 4 deep Operating port 2-M5 X 0.8 7 2 3.5 J 6 Max.9.5 (With stroke adjuster at retraction end) I Basic type 6.5 4 6.5 7 7 3.8 NA-M3 X 0.5 thread 4 deep 14.6 K 7 3.8 14.6 KA 2 (With stroke adjuster at

Pin Clamp Cylinders

x 4 L) and spring washer (M3).

MHC2

MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

MHC2

MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

SMC

0.5 3 5.5 (With stroke adjuster at extension end) 18 Stroke adjuster at retraction end Stroke adjuster at extension end N-M3 x 0.5 thread depth 4 (Insert) K 12.5 2-M2.5 x 0.45 thread depth 3 Vacuum suction port M5 x 0.8 6.5 3 3 5.5 3 5.5 5.5 7 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 2 2-M2.5 x 0.45 thread depth 3 Operating port 2-M3 x 0.5 6 3H9 depth 2.5 +0.025 0 HA GA

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no

Air Slide Table

For details, refer to the MXQR Operation Manual. 2 7 J I 3.5 6.5 3.5 6.75 3 depth 3 +0.03 0 3 depth 3 +0.03 0 4 N x M3 x 0.5 thread depth 5 6.5 3.5 0.7 16 1 17 15 36 24 16 1 32 12 F 5 4 x M3 x 0.5 thread depth 4 10 -1 x F 2 N 12 3 x M4 x 0.7 thread depth 6 M 6 KA 14.6 7 3.8 NA x M3 x 0.5 thread depth 3.5 K 14.6 Bottom view of MXQR8-30 7 3.8 14 21.2 0.3 27 23 6 4 23 Z ZZ (NN-1) x H G H 13.5

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Max. 5.75 2-M3 x 0.5 2-M4 x 0.7 depth 8 6-M3 x 0.5 depth 4 Top ported: MSUB1-DE B port A port 2-M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Series 11-MXJ Air Slide Table

Operating port 2 x M3 x 0.5 I J Vacuum port M3 x 0.5 3.5 (Plugged when the product is a symmetric type.) 4 3 8 K 4 x M3 x 0.5 thread depth 5.5 Note 2) Note 3) 2 x M3 x 0.5 thread depth 3.5 17 5 Note 1) When using a positioning pin, use a stepped positioning pin. For details, please consult with your SMC sales representative.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

60 9.5 11-/22-MXP6-10 834 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP10 11222 x M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2 x M3 x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port Width across flats 5.5 4 x M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth

4/5 Port Air Operated Valve Series SYJA3000 1

x 0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

4/5 Port Air Operated Valve SYJA3000 Series

x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

VZ5000

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

max. m1, m2, m3 max.

Manifold Specifications

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0.2 28 0.2 22.7 35 37 16 6.3 5 12 2-R 3.5 2-M2.5 x 0.45 x 6l 4-M3 x 0.5 (Through-hole) 6 7 (Hexagon socket head cap screw) 2-M3 x 0.5 x 12.5l, 2-M3 x 0.5 (Hexagon bolt) (Hexagon nut) 4-M3 x 0.5 (Through-hole) W (10) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4 5 2 3 4 5 CY1H20 CY1HT32 13 16 13 64 96 64 CY1H10 CY1H10 1.5 1 M3

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.