Electric Rotary Table

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Free-Mounting Cylinder with Air Cushion Series CU

JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth

15

Dimension is the same as the standard Plate 2 x 2 x J Maximum screw-in depth: R Bore size (mm) J (Thread size) 6 10 15 20 25 32 40 R (Maximum screw-in depth) M4 x 0.7 6.5 Dimension is the same as the standard M5 x 0.8 9.5 M6 x 1 9.5 M6 x 1 9.5 M8 x 1.25 10 M10 x 1.5 15 M10 x 1.5 15 1508 CY1S Series Specific Product Precautions 1 Be sure to read this before handling the products.

Electric Actuator / Low profile slider type

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603. Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

MGC

O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)

3 Position Cylinder Series RZQ

RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75M5 x 110 L 110 M5 x 135 L 8 9.5 135 M5 x 160 L 160 RZQ32-12-S7515 2 pcs. M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.

MGC

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

Process Pump

Thread type Note 2) Symbol Nil N F Type Rc NPT G Port size Symbol 06 Port size 3/4" Tube extension 0 PAF541 P19 Option Actuation Note 1) Applicable actuation Automatically operated Air operated Symbol 0 3 Actuation Symbol Option Automatically operated Air operated Nil N None With silencer For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

Electro-Pneumatic Proportional Valve

Analyzer, instrumentation Specifications PVQ10 03: 0.3, 04: 0.4, 06: 0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40

17

depth K VV ZZ ZZ(MY1BG) (Hexagon socket head taper plug) VV MY1BG MY1BG MY2C Standard piping/Centralized piping (mm) MY2 H/HT A B C G GB H K J LD L LL LW M MM N NC Model E 2 JJ M5 x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50

Vacuum Gripper

ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2 ZP B30 J ZPGB30J-7A-X2 18 19 19 25 ZP2-B30J ZP3P 20 JT2 SF ZP3PG20JT2SF-7A-X2 21 ZP3P-20JT2SF-W ZP3PA-T1JT-7A-X2 ZP3P 20 JT2 SF M ZP3PG20JT2SF-M-7A-X2 21 ZP3P-20JT2SF-WM ZP3P 32 JT2 SF ZP3PG32JT2SF-7A-X2 48 ZP3P-32JT2SF-W ZP3PA-T2JT-7A-X2 ZP3P 32 JT2 SF M ZP3PG32JT2SF-M-7A-X2 48 ZP3P-32JT2SF-WM