Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 6mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 25mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 6mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

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Tubing Size Symbol Type Body Class Tubing outside diameter Metric size 4 04 6 06 8 08 10 10 1/8 03 3/16 05 1/4 07 3/8 11 1/2 13 3 J Inch size Table 2. AC Insert Pin. Holder Assy Model Number LQ-GPJ LQ-GPJ-N LQ-GPJS LQ-GPJS-N LQ-GJLQ-GJ-NLQ-GJSLQ-GJS-NLQ-GC Larger Diameter Tubing How To Order LQ GC Nil B None With bracket Type Table 1.

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: F (Fluoro Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 25mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotation: J (Rotating), Stroke: 10mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A B A B A FREE LOCK 1-3-11 12 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 6 Cassette Type Manifold Series SZ3000 Manifold Options DIN rail dimensions/Weight table D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below in the .

T

Model K Dimensions (mm) Weight (g) Model Tip color Applicable tubing M D1 D2 L TKS-06 Orange TRB0604, TRBU0604 16 45 58 H TKS-08 Yellow TRB0806, TRBU0805 18 35 TKS-10 Blue TRB1075, TRBU1065 20 50 62 D TKS-12 Green TRB1209, TRBU1208 22 Inner tubing material/TRB: Nylon, TRBU: Polyurethane MS Dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

. / N.C.), Pressure Sensor/Digital Pressure Switch for Vacuum Spec: J (Digital Pressure Switch for Vacuum / -100 to 100 kPa / PNP 2 Outputs / SI Unit only), Supply Valve/Release Valve/Digital Pressure Switch for Vacuum Connector Spec: C [Common Wiring (plug-in) - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum (V) Port: 06 [ø6 One-touch Fitting

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Push Lock Type, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/8, Types of Screw: R, Applicable Tube O.D. mm(mm): -, Applicable

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Push Lock Type, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/8, Types of Screw: R, Applicable Tube O.D. mm(mm): 4, Applicable