Coolant Valve

2 3 4 6 5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

Vacuum Equipment

Tubing O.D. 9 Selection Procedure V x 60 Q Adsorption response time T1 = When the suction flow rate of 53 kPa is obtained from the ZH07DS flow characteristics graph, the leakage volume is 5 l/min (ANR). () Leakage: Adsorption flow (5 l/min) (ANR) Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1 1000 V = D 2 x L x ( l ) Example 2: For obtaining the discharge response time until

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-X037

0.0210.0 V (2) Analog Output 2 Analog output signal 2 CH2 circulating fluid temperature 0C100C: 010 V *1 CH2 electric conductivity 0.150.0 S/cm: 0.0210.0 V 1: By default. 2: In the case of option D1 "CH1 with electrical conductivity control".

VQ20/30

VC 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 24 V 12 V 100 V 200 V 110 V A VDW A VQ B DIN Terminal Circuit with Indicator Light VX2 A AC circuit DC circuit Mounting procedure 1) Hook the mounting hook on the side of the manifold base to the DIN rail. 2) Lift the side of the manifold off the DIN rail and slide it in the

SMC Pneumatic Clean Series

Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

Booster Regulator Series VBA1110 to 4200 1

V [l] = (Q Qb/2) x (Tc x K/60) Booster regulator VBA111 VBA200 VBA400 (P3 P2 ) x 9.9 Tank VBAT05 VBAT10 VBAT20 Tc [s] = 100 = 0.5 Conditions: Inlet pressure: 0.5 MPa Outlet side set pressure: 1 MPa Flow rate: Between 0 and max. flow rate 200 V [l] = (841 500/2) x (0.5 x 2/60) = 5 (1 0.8) x 9.9 Select tank with the capacity over V.

Compact Cylinder with Air Cushion

Note D-F7, J79 D-F7V D-J79C D-F7W, J79W D-F7WV D-F7BAL D-F7BAVL D-F7F D-F7NTL Kits consist of piston seal, rod seal and gasket RQ Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut D-A7, A80 D-A73C, A80C D-A7H, A80H D-A79W 32, 40, 50, 63, 80, 100 BQ-2 [Stainless steel mounting screw kit] Use the following stainless steel mounting screw kit (includes nut) depending on

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

High Purity Chemical Valve

Dimensions LLHmA-mm Stations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A B C D E G H1 H2 K N U V W Y Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19

MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

Prevents Micro-Bubbles

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5

SMC

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

MHK2

Model Bore size (mm) Opening/Closing stroke (mm) Option Series Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluoro rubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P(V) D-M9B(V), Water resistant (2-color indication), D-F9BAL MHK2-12 12 4 MHK2-16 Parallel opening/closing 16 6 Standard type Series MHK2 Longer strokes

MHK2

Model Bore size (mm) Opening/Closing stroke (mm) Option Series Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluoro rubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P(V) D-M9B(V), Water resistant (2-color indication), D-F9BAL MHK2-12 12 4 MHK2-16 Parallel opening/closing 16 6 Standard type Series MHK2 Longer strokes

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

12 V 2-wire Reed switch Solid state switch REC Connector 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire IC circuit Diagnostic indication (2-color indication) Relay, PLC CY 24V Yes CX Grommet IC circuit Water resistant (2-color indication) IC circuit MQ 5 V, 12 V With diagnostic output (2-color indication) 2-wire (Non-polar) Magnetic

Fieldbus system (SI unit – PROFIBUS DP compatible)

Description Function 1 SV24 V +24 V for solenoid valve. 2 SV0 V 0 V for solenoid valve 3 SW24 V +24 V for SI unit and Input Block 4 SW0 V 0 V for SI unit and Input Block 5 FE Ground -13No.EX-OME0014-F Maintenance Addition of Input Block Remove screws from End Plate. Mount attached tie rod. Connect additional Input Block.

EX250-SPR_eng

(Allowable SW power supply range: 19.2 V to 28.8 V) Fig. a Fig. b Summary of Product elements Double Single Double Double Double Single Double Double No. 0 2 4 6 Side A No. 5 Side A 0 2 3 5 Station Station 1 2 3 4 1 2 3 4 6 No. 1 3 5 7 Side B No. 1 4 6 Side B R O I PROCESS FIELD BUS F R P Voltage drop of max.1 V B U S PWR(V) RUN DIA BF H L H L ADDRESS + EX250 Free EX250 DIA BF PWR(V) RUN