High Vacuum Slit Valve

When the shaft moves up and down, axial seal between a body 21 and outside is realized by O-rings and and a bellows .

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Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

5 !2 !4 q !0 !3 i Component Parts No.

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

SYJA300

) 2 x 3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P, A, R port) M5 x 0.8 23 1794 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With bracket F Nil Without bracket SYJA 2 5 1 M5 Body

NARM Series

2.76 2.09 .93 1.08 1.91 2.17 1.38 2.32 3.37 1.67 (7) (21) (54) (968) (55) (153.5) (70) (53) (23.5) (27.5) (48.5) (55) (35) (59) (85.5) (42.5) Dimensions by number of stations Model Symbol 2 3 4 5 6 7 8 9 10 NARM2500 L1 4.66 6.30 7.95 9.61 11.26 12.91 14.57 16.22 17.87 (118) (160) (202) (244) (286) (328) (370) (412) (454) L2 4.17 5.83 7.48 9.13 10.79 12.44 14.09 15.75 17.40 (106) (148) (190

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Activated Carbon Filter

How to order 9 5. Construction / Options / Replacement parts 10 6. Bowl assembly specifications 11 to 13 7. Assembly of Optional parts 14 8. Troubleshooting 15 9. Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Relation between Operating Temperature and Maximum Operating Pressure Particulate Generation Classifications 105 1.2 Particle concentration (Particles/m3) Maximum operating pressure MPa ISO class 6 1.0 104 ISO class 5 0.8 103 ISO class 4 0.6 102 ISO class 3 0.4 10 0.2 0.1 0.5 1 1 0 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to SMC Pneumatic Clean Series (CAT.E02

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

47.2 52.2 18.5 Applicable tubing O.D. d AS221FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS221FE-02-10SK 20 21 43.2 33.9 10 18.5 42 AS321FE-03-06SK 16 39.3 27.8 6 12.8 57 AS321FE-03-08SK 18.5 41 29.5 8 15.2 60 R 3/8 19 14 46.5 51.5 52.8 57.8 20.9 23 AS321FE-03-10SK 21 43.3 31.9 10 18.5 62 AS321FE-03-12SK 22 44.3 32.8 12 20.9 64 AS421FE-04-10SK 21 47.9 33.6 10 18.5 103 R 1/2 24 17 51.5 56.5 59.7

KS/KX

(mm) Connection thread R Effective area (mm2) Min. port size Weight (g) M D1 D2 L1 L2 A Model Nylon Urethane M5 x 0.8 M6 x 1 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 12 10.4 21 16 2.5 3.5 3.5 23.5 23.5 1 8 M5 x 0.8 M6 x 1 12 14 22 21 21.5 23 2.5 3 3.5

M-E05-1-LQ1

Union Tee Reducing LQ1T-T-R p. 5-18 Union Tee LQ1T p. 5-6 Space Saving Type Union Elbow LQ1E-SN p. 5-19 Panel Mount Union LQ1P p. 5-7 Space Saving Type Union Tee LQ1T-SN p. 5-20 Union LQ1U p. 5-7 Space Saving Type Panel Mount Union LQ1P-SN p. 5-21 Union Flange LQ1F p. 5-8 Union Elbow Reducing LQ1E-R p. 5-8 Space Saving Type Union LQ1U-SN p. 5-22 Union Tee Reducing LQ1T-R p. 5-9 5-1 A Male

Valve Single Unit

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

ARX Series

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX Series Specialty Regulators Regulator for 290 psi (2 MPa) ARX20, 21 Dimensions Panel cutout dimensions 1.02 (26) R .1 (2.5) SUP OUT SMC K C O P A A L U S H .5 (12) 1.61, 2.13 [41 (K40)], [49 (K50)] 2.13 (54) .98 (25) 1.6 (max. thickness 4.5) 1.73 (44) .21 (5.4) 3.13 (79.5) (when regulating pressure = 3.23

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 2) Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface. Maintenance and inspection will be facilitated. 3) Air is normally released from the bleed hole.

NVKF

4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted (Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44

NVZseies

stations exhausl hom bolh sides of manllold. 20 20 stations BLnk pHl.3dy DXT20I -r 5-14 NW3Z5-2!Ol NW3Z5-21R{)l Applkrbl. valvo6 . NW3Zs-21-O1-007 Nvzsl2-OOO-o1T NVz5i2M-OOO-017 . NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold.

3 Way Direct Acting NVKF 300 Series

4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted (Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44

3 Way,3 Port Solenoid Valve NVZ Series

stations exhausl hom bolh sides of manllold. 20 20 stations BLnk pHl.3dy DXT20I -r 5-14 NW3Z5-2!Ol NW3Z5-21R{)l Applkrbl. valvo6 . NW3Zs-21-O1-007 Nvzsl2-OOO-o1T NVz5i2M-OOO-017 . NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold.