Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder 16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5
Bit3 22 D15 10 1 Bit3 4 D3 10 Bit0 23 D16 10 2 Bit0 5 D4 10 Bit1 24 D17 10 2 Bit1 6 D5 10 Bit2 25 D18 10 2 Bit2 7 D6 10 Bit3 26 D19 10 2 Bit3 8 D7 10 Bit0 27 D20 10 3 Bit0 9 D8 10 Bit1 28 D21 10 3 Bit1 10 D9 10 Bit2 29 D22 10 3 Bit2 11 D10 10 Bit3 30 D23 10 3 Bit3 12 D11 10 13 (+/-) 31 N.C. 14 DATA VALID 32 N.C. 15 N.C. 33 N.C. 16 COM 34 COM 17 N.C. 35 N.C. 18 COM
If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes) before operation.
IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.
LCD 4.DIN 30mm 30mm 10 - 2-2 30mm No. 2-3 (1), (Err6), 1 ML2B25 15 ML2B32 19 ML2B40 24 2-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm30mm Err6: 20 30 100mm/sec :50cm :0.5MPa 11 - 3 3 3 3 ML2B+CEU2 NO 1 () () YES NO () YES NO YES YES NO YES NO YES YES NO NO NO YES A 12 - A 1.
Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no. Pin no.
17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 Port Thread: Rc1/8, NPT1/8 Female Rod
No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +
to 500 psig (0.07 to 3.4 MPa) Bonnet option 01 02 06 10 15 20 30 50 0.5 to 10 psig (0.0034 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) Code Bonnet Standard Panel installation 6) Code Connections NPT 1/4 inch 1/4 inch compression 3/8 inch compression No code P 4 4T 6T 6) Panel mounting hole: dia. 1.42 inch (36.1 mm).
Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR
Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 Silencer
For precise flow detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -94No.PF-OMA1011-A Problem No.
M 10-1 . 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023
[mm] Bore size Allowable interval 12 (10 x 2) 15 16 (12 x 2) 15 20 (16 x 2) 15 25 (20 x 2) 10 32 (25 x 2) 5 40 (32 x 2) 0 50 (40 x 2) 0 63 (45 x 2) 0 80 (56 x 2) 0 100 (71 x 2) 0 Allowable interval Allowable interval View View 11 Prior to Use Auto Switch Connections and Examples Sink Input Specifications Source Input Specifications 3-wire, NPN 3-wire, PNP Input Input Brown Brown Black Black
If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).
If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).
to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 13 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.
Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification for Option R 11 1 Safety instructions .11 1 11 2 Specifications .11 1 11 3 Power supply connection procedure .11 2 11 4 Cautions for handling the GFCI .11 3 11 5 Electric circuit .11 3 Chapter 12 Specification
Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11-12 8. Operation and Adjustment 13-14 9. Trouble Shooting 15-16 10. How to Replace the Components 17-24 10-1. Diaphragm Assembly Replacement 17 10-2. Valve Guide Assembly and Valve Assembly Replacement 18 10-3. Square Embedded Type Pressure Gauge Replacement 19 10-4.
65 C (No freezing) 2) 0.7 1.3 1.0 Inboard leakage Outboard leakage 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 4) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m) Face seal , Tube weld Bottom mount 0.36 in3 (6.0 cm3) 1.27 kg 5) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight 1/4 turn round knob with open/close indication window 7)