SMC Corporation of America
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and steel piping P = Operating pressure [MPa] l = Length of piping [mm] Internal cross section a (mm2) Nominal size O.D.

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 Options Sensor cable (3m) + Connector (1 pc.)

R port SY3000(Metric size):With one-touch fitting for8 (Inch size):With one-touch fitting for5/16 P,R port SY5000(Metric size):With one-touch fitting for10 (Inch size):With one-touch fitting for3/8 2 SUP/ EXH block SX3000-51-15A (Inch size) assembly 3 End block assembly R SX3000-52-1A SX5000-52-1A For D side 4 End block assembly L SX3000-53-1A SX5000-53-1A For U side 5 Round head SY3000-23

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

[101 to 101 kPa] 0 1 2 3 Option Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without cable Sensor cable (3 m) M5 Port size L M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.)

P N S Ground ball screw Rolled ball screw Slide screw 1 2 Series LJ1H10 Standard Motor Motor Output Ground Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 PB 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

Reference [IDFA150F] For Option R GFCI PE TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 FM3 T SWL PLC TB2 Y0 1 MC1 Operation COM0 2 MC1 Y3 3 Y1 Failure MC2 COM3 PRS1 4 P X4 5 Remote control PRR COM1 X0 6 THR X1 THS3 THS2 THS1 X2 L Symbol Description N PRS2 PRS3 CM Refrigerating compressor X3 EDV PE OLR Overload relay P P MC1,2 Magnetic contactor 24V THR Thermal relay For Option V THS1,2,3 Thermostat

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

VBAT05A VBAT05S VBAT10A VBAT10S VBAT20A VBAT20S VBAT38A VBAT38S P P P Air tank CE Certified Product P P Model VBAT05A l-SV-Q VBAT10A l-SV-Q VBAT20A l-RV-Q VBAT38A l-SV-Q P P Compressed air Fluid Selection Tank capacity (L) 38 20 10 5 Max. operating pressure (MPa) 2.0 1.0 Caution IN port size 3/4 3/4 1/2 3/8 Consider the operating conditions and operate this product within the specification

Option (A) 2 1 Nil: F: None With bracket 1 (P) 3 (R) Body type Bracket Function AC Symbol Specifications DC Port size [2(A) port] (0.35 W) p (0.9 W) p Note 3) Nil p Standard C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) R Note 1, 2) K Note 1) High pressure type p p External pilot type KR Note 1, 2) (0.9 W) p High pressure/External

L IZS41-CP 3000 +60 0 +100 0 IZS41-CPZ 9850 AC adapter Shield wire IZF21-CG1 (with AC cord) IZF21-CG2 (without AC cord) Inlet IEC60320-C6 33 Doc. No.: IZ-OMR0035 7.

x 18 l 4 x 25 l 4 x 35 l CL1 MLGC Note) Cotter pins and flat washers are included.

[kPa] Max. suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Weight*6 [g] Page ZL1 84 100 57 180 p. 7 ZL3 93*4 300*5 135*4 390 p. 19 *4 ZL3H, ZL6H (Standard supply pressure: 0.5 MPa) *5 Branch + Port exhaust *6 Basic type ZL6 93*4 600*5 270*4 470 p. 19 ZL1/ZL3/ZL6 Series CAT.ES100-108B A Multistage Ejector ZL1/ZL3/ZL6 Series Energy saving Suction: 100 L Suction: 300 L Suction

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

=2.4): P 0.08MPa VNH133AB(Cv=1.7): P 0.16MPa VNH413AB(Cv=1.4): P 0.23MPa VNH313AB(Cv=1.0): P 0.45MPa VNH213AB(Cv=0.7): P 0.9MPa VNH113AB(Cv=0.4): P 0.8MPa Calculation by Cv factor Q=14.2 Cv .l/min 10.2P G Calculation by effective area Q=0.8 S .l/min 10.2P G (Symbol) Q : Flow rate(l/min) P : Pressure differential P1-P2(MPa) P1 : Primary pressure(MPa) P2