AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

SI Unit for Vacuum Manifold

4.0 to 8.0 mm the feed No. holes Electric wire cross section (Twist line) AWG26 to 22 YE=Yellow or OGWH=Orange/ White 1 Orange/ TD+ White WH=White or GNWH=Green/ White 2 Green/ RD+ White 3 Orange OG=Orange TD4 Green BU=Blue or GN=Green RDFig. 9-2 PCA-1446553 -35No.EX-OMY0014-A (3) Cable with communication connector (M12 RJ45) Part number: EX9-AC 01 0EN-PSRJ Cable length (L) 01 1000 [mm] 02

ATX-OM-F003E

CDecember 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

IDX-OM-M051

Description Maintenance/Service Work Description Date 7.1 Service Record 7 1 IDF100F~150F-W Revision Rev CSeptember,2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights

IDX-OM-Z004

3.1 INOUT R INOUT 3.2 ONON IN OUT 5 IDF100150F-W 3.1 3 1 IDX-OM-Z004 3 ONOFF 0.05MPa 3.3 OFF OFF 3.4 3 3 5 3.5 OFF IDF100150F-W 3.3 3 2 IDX-OM-Z004 3 3.6 0 1 0 1 0 1 2 3 2 3 4 5 4 5 6 7 6 7 2 3 4 5 6 7 0 1 3 4 5 OFF OFF5.2 3 3 IDF100150F-W 3.6 3 3 IDX-OM-Z004 3 3.7 2A 80VA 100W DC5V,2mA IDF100150F-W 3.7 3 4 IDX-OM-Z004 4 4 4.1 5 310 4.2 4.2.1 (1) (2) JRA-GL-02

IDX-OM-Y002

In most cases, cooling performance of the water-cooled condenser is deteriorated by the contamination of the cooling water of adhesion of scales. (2) Cooling Water Quality Standard 1 Water quality standard As a guideline for cooling water quality which does not cause abnormal level of contamination or scale, JRA-GL-02-1994 Guideline of Water Quality for Refrigeration and Air Conditioning

IDX-OM-P023E

The capacity regulating valve opens when the compressed air has been cooled sufficiently, and prevents condensed water from being frozen by excessive cooling. 6 4 Revision Rev AApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

IDX-OM-P026E

The capacity regulating valve opens when the compressed air has been cooled sufficiently, and prevents condensed water from being frozen by excessive cooling. 6 4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: http://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part

IR30-OM00013

8,1/2 Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02

DOC1023894

Example) KEC-02-X2 (5) The dimensions shown in the dimension drawings are merely reference dimensions. The actual dimensions will vary depending on the tolerance. Be sure to provide sufficient clearance around the fitting for piping.

ISE7xG.eng

Piping Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm.

ISE70_71-AB.eng

Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm.

Digital Gap Checker

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2022 SMC Corporation All Rights Reserved No.PS-OMT0002-E

VF1000-OMP0001

(X) (B) 2 (X) (A) 4 (B) 2 (A) 4 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) (X) (B) 2 (X) (A) 4 (A) 4 (B) 2 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 9 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 3.2~3.7mm () 300mm ) ) ) ) (+ -) ( ) ) ) ) ) Assy 2000mm VF3230-5MO-02 3 DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144

3/5 Port Solenoid Valve

.: VK300-82-1 Part no. of connector with indicator light Rated Voltage symbol Part no. voltage 100 VAC 100V VK300-82-2-01 110 VAC 110V VK300-82-2-03 200 VAC 200V VK300-82-2-02 220 VAC 220V VK300-82-2-04 Precautions on connection of 24 V or more DC Grommet type should be connected as following; Red lead wire for (+) side, Black lead wire for () side respectively.

VEX-OMV0001

ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,NPT 23 (R,NPT) Nm 1/8 35 1/4 812 3/8 1520 1/2 2025 3/4 2830 1 3638 11/4 4042 11/2 4850 2 4850 () 1 5 VEX-OMV0001 VEX1 Series / () 5 () 30 ( ) 6 VEX-OMV0001 VEX1 Series (904 ) 3.57 () (AF )(AMAFM ) ( ) 22 3 JIS C 3306 0.5mm () () IR2000 A VEX1 B33 VK300-82-1 ITV VY AC100V 100V VK300-82-2-01 AC110V 110V VK300-82-2-03 AC200V 200V VK300-82-2-02

Precision Cylinder Series MTS

2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part number: MT-S25 Rod end nut part number: NT-02

Air Cylinder NCA1 Series

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

HRX-OM-W004

(Initial value: 30sec.) 4.3 Setting and checking HRR Series 4-4 Revision Rev H [Jun 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Peltier-type Chiller Thermo-con/ Compact Type

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G