This is a legacy product, and replaced byVM130-N01-33A, VALVE MECH, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CA, VM BODY PT 1/8NPT (F), 0.37663 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

This is a legacy product, and replaced byVM131-N01-01SA, VALVE, MECHL 1/8 NPT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CA, VM BODY PT 1/8NPT (F), 0.2178 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube,

This is a legacy product, and replaced byVM131-N01-35BA, VALVE, MECHANICAL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CI, VM BODY PT 1/8NPT (F), .61600 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores

This is a legacy product, and replaced byVM151-N01-35BA, VALVE, MECHANICAL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CI, VM BODY PT 1/8NPT (F), 0.53541 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3

This is a legacy product, and replaced byVM151-N01-35RA, VALVE, MECHANICAL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CI, VM BODY PT 1/8NPT (F), .61600 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores

This is a legacy product, and replaced byAKM3000-N01

This is a legacy product, and replaced byAK2000-N01, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores, ?

This is a legacy product, and replaced byVM131-N01-01A, VALVE, MECHL 1/8 NPT *LQA, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CA, VM BODY PT 1/8NPT (F), 0.1936 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube

This is a legacy product, and replaced byVM131-N01-01A, MECH VALVE NON-EXCH ACTUATORS, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CA, VM BODY PT 1/8NPT (F), 0.2068 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air

IS1000

contact capacity AC 2 VA, 2 W DC 24 VAC/DC or less 48 VAC/DC 100 VAC/DC Voltage 50 mA 40 mA 20 mA Max. operating current 30 G Impact resistance Operating Pressure Range Electrical Circuit ON pressure OFF pressure Up to 100 VAC/DC 0.5 Hysteresis Operating pressure (MPa) 0.4 Reed switch 0.3 0.2 0.1 0.1 0.2 0.3 0.4 0 Set pressure scale (MPa) How to Order IS1000 01 S Port size Seal Option 01 N01

V

100kPa Low Cracking Pressure: 0.03Mpa T E C H N I C A L SPECIFICATIONS (N)AK2000 SERIES D I M E N S I O N S S E R I E S NAK 1.5MPa / 220PSI Proof Pressure 0.003 ~ 1MPa / 0.4 ~ 145PSI Operating Pressure -3 to -100KPa / -0.4 ~ 14.5PSI Pressure Range Vacuum Air Fluid 5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

NCX2 seies

Eack (white) lead wire: connecl lo load (to lhe inpul of squence conlroller and outlel 3 wire sltlsn (l44ren povt sqroe lor s* bh and bsd is n01 conmofll Brown^{Red) I Pm]ffie,'e-| ' Elue.IBlack)L.: . Blue (Black) l6ad wire: Connecl lo the power source O. 2 wire system -Brown (RedE-@ I l ' : L o a d L _ o I L Bl!%(9!csiL -re o Series NCDX2 Switch Circuit cD-P12 D-A73, D-A73H.

Process Pump

back of the previous type: C With bracket which can be mounted to the foot at the back of the previous type: F 56 2 x M4 x 0.7 2 x 4.5 84 72 45 7 48.5 41 5 Process Pump (Diaphragm Pump) Wetted Materials: Fluoropolymer Air Operated (External switching type) Series PB1313A RoHS How to Order Port size Main fluid connection size Connection size in the air side Symbol Female thread Actuation 01 N01

25

type: C With bracket which can be mounted to the foot at the back of the previous type: F 56 2 x M4 x 0.7 2 x 4.5 84 72 45 7 48.5 41 588 Process Pump (Diaphragm Pump) Wetted Materials: Fluoropolymer Air Operated (External switching type) RoHS PB1313A Series PA How to Order PA(P) Port size Main fluid connection size Connection size in the air side Symbol PAX Female thread Actuation PB PB 01 N01

1

Suffix for indicator Body option Nil None Z With miniature indicator Nil Side mounting U With bottom mounting thread Note) Applicable only to bottom ported type Note) U: Applicable only to side ported type Suffix for actuator* Port size S Hard steel roller R Red Color of push button, selector 01 R1/8 Side ported only N01 NPT1/8 F01 G1/8 M5 M5 x 0.8 Bottom ported only B Black G Green Y Yellow

Pressure Switch/Reed Switch Type

Place them in alphanumerical order. q e w Switch Characteristics Description Symbol Example) IS10-N01-6PZ Nil N Rc NPT q q Thread type Max. contact capacity AC 2 A, DC 2 W 24 V or less Note 1) Set pressure range of 6P(L, Z) is 0.2 to 0.6 MPa (30 to 90 psi). This product is for overseas use only according to the new Measurement Law.

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Metric size Inch size Body size Port size 06 6 3 1/8 standard 07 1/4 Symbol Cylinder side 08 8 4 1/4 standard 09 5/16 01 R1/8 10 10 11 3/8 5 3/8 standard 02 R1/4 12 12 13 1/2 6 1/2 standard 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series XTO257102 Applicable tubing O.D.

D

Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details. KE 12 3/8" 1/2" With One-touch fitting AS-FG Note) For applicable tubing O.D. selection, refer to the Model on page 734.