AF800/900

(Ex.) 68 Note 4) Symbols "9", "D", and "J" can not be specified at the same time. (Ex.) 9 specified at the same time. (Ex.) 9DJ 2 2 Flow rate (l/min(ANR)) The bowl of series AL is used. This symbol "l" indicates the port size. 3 4 1 4 1 2 3 4 5 Rc(PT) 1 8 Rc(PT) 1 8 G(PF) M10 x 1 M10 x 1.5 1.4-12 Series AF800/900 Construction Component Parts Material AF800 AF900 No.

NCQ8

) Symbol Stroke A 0.81 1/8" to 1" 1.38 1 1/4" to 2" 075 (3/4"), 106 (1-1/16") P-port H-thread C-depth 4 places Z Q 0.15-through hole J M2 bolt circle W M1 E I dia.

Manifold Regulator ARM1000/2000 Series

56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 PVQ

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

flange surface Indicator Without indicator Pilot port direction Indicator Without indicator Pilot port direction Symbol Nil A F G J K L M Left flange surface Right flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange

Thermo-chiller Series HRS Compact Type (Except HRS050)

Note 4) q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Rated circulating fluid flow rate, r Circulating fluid: Clear water, t Facility water temperature: 25C Note 5) Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temperature is 10C or less.

MG

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

MGP

OA through 4-OB depth of counter bore 8 4-MM depth ML 4-YY depth YL 4-NN through Section XX Section XX Section XX HA: T-slot for hexagon bolt Z WA 30 L HR X 0.02 X 0.02 X 0.02 R T VB VA H DA 21 40 PW X U X DB End lock mechanism non-locking type manual release 6H7 depth 10 2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10

This is a legacy product, and replaced byVT317E-5D-02F-Q

This is a legacy product, and replaced byVT307-5D1-02F-Q

This is a legacy product, and replaced byVT317-3DO-02F-Q

This is a legacy product, and replaced byVT317-5DO-02F-Q

This is a legacy product, and replaced byVT317-5DZ-02F-Q

This is a legacy product, and replaced byVT317-5DO-02F-Q

Rotary Table/Rack & Pinion Style Series MSQ

1 1 1 1 12 12 12 12 12 12 12 1 1 1 1 4 4 4 Parts included 13 13 13 13 17 17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 8 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 4 Stations, P,E Port Location, SUP/EXH Assembly: J (Port Location Both Sides, External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail

Vacuum Pad

across flats 19 5 5 50 5 5 50 B A 6 B A M14 x 1 M14 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 6 4 4 M8 x 1.25 M8 x 1.25 K: Non-rotating D-D J: Rotating D-D Dimensions Dimensions Part no.

Compact Guide Cylinder

/2 Z X 4 x YY depth YL GD 40 Bottom view WA + Stroke/2 Z 2 x P (Plug) 4 x MM depth ML 4 x OA through 4 x OB counterbore depth OL L (OL) 4 x NN through U X PW PE VA 2 x P (Plug) H T R 2 x P D GB GC S Q 2 x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3

ZM

How to Order ZM L Nozzle diameter 05 07 10 13 15 0.5 mm 0.7 mm 1.0 mm 1.3 mm 1.5 mm Release flow rate adjusting needle CE compliant Nil Q Nil L Without lock nut CE compliant With lock nut Compatible with release valves only. Vacuum port location Made to Order Refer to pages 1004 to 1006 for details.

Thermo-chiller

With automatic fluid fill function L Large capacity tank specification V Stainless steel panel specification W SI unit only Pipe thread type Nil Rc F G (with PT-G conversion fitting set) N NPT (with PT-NPT conversion fitting set) Power supply When multiple options are combined, indicate symbols in alphabetical order.

VXF2

20A NBR/POM Without Grommet 25A NBR/POM A With A Direct piping type 40A 24 VDC 50A A B Direct piping type B C D E F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100 VAC 7 8 90A