MRQ

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19

VP4

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3 G49-2-l02MS-X3 Round type Note 2) 0.2 MPa G49-7-l01MS-X3 G49-7-l02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

48

M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5

Compact Manifold Regulator

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR-A 01 02 03 13 14 15 51 52 53 63 64 65 5 56 56 5 IR 0.4 0.2 0.6 0.5 SMC 20 MPa 24 20 17 24 56 IRV 0.3 0.1 VEX 32.5 SRH 4.

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Flame Resistant

15.2 27.2 36.4 18.5 48 AS221F-G02-10W2D 18.5 35.3 44.5 21 50 AS321F-G03-08W2D G3/8 19 15.2 23 21 9.8 29.7 41.2 22.7 55.6 1.2 49.5 18.5 87 AS321F-G03-10W2D 18.5 31.6 43.1 21 89 AS321F-G03-12W2D 20.9 32.8 44.3 22 91 AS421F-G04-10W2D G1/2 24 19.5 28.6 25 12.4 33.6 47.9 26.8 65.3 1.2 56.7 21 150 AS421F-G04-12W2D 20.9 34.6 48.9 22 156 2 These safety instructions are intended to prevent hazardous

CLQ

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

Gun Type Ionizer

Number of needle rotations Flow rate [L/min (ANR)] 2 21 4 60 6 124 7 200 Supply pressure: 0.4 MPa 3 High visibility LEDs Rear mounted LEDs are easy to see during operation.

VCA

Stations 02 2 stations IN port direction ... ...

VFRA3000

VVFS3000-10A 1 pc. 3.2-21 VFRA3000 Dimensions 2 position single: VFRA311102 03 2 position double: VFRA321102 03 SlA VlA SlA VlA VM/VR VH ( ): In case of Rc(PT) 1 4 ( ): In case of Rc(PT) 1 4 02 03 02 03 02 03 3 position closed center: VFRA33113 position exhaust center: VFRA34113 position pressure center: VFRA3511( ): In case of Rc(PT) 1 4 3.2-22 5 Port Air Operated Valve Series VFRA4000

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

02 2 stations 2 stations Double wiring Note 1) Double wiring Connector mounting position 10 11 10 stations 11 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to 22 solenoids possible) Specified layout Note 2) (Up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10

5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Symbol 02 2 stations 2 stations Double wiring specifications (1) Double wiring specifications Connector mounting position 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Series VCL

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

Series VCS

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8. Stainless steel Refer to the L dimensions on page 6 regarding the maximum number of stations.

pa

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread type Nil T Automatically operated type built-in pulsation attenuator Rc NPTF G NPT FLUID OUT AIR SUP 2 F N AIR EXH FLUID IN T, F, N are options.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8. Stainless steel Refer to the L dimensions on page 6 regarding the maximum number of stations.