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Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

This value can be used for the selection of the power supply. 12) With lock only 13) For an electric actuator with lock, add the power consumption for the lock. 14) Excludes the controller body and the connector part on the controller side. Details of enclosure rating Enclosure rating Details Solid foreignobjects Dust-tight Dust particles are prevented from entering the device.

53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Refer to SMC Best Pneumatic catalog Vol. 14 catalog for compressed air quality. Precautions on Other Tubing Brands Caution 1.

Refer to SMC Best Pneumatic catalog Vol. 14 for compressed air quality. Caution 1. Drain flushing Remove drainage from air filters regularly. Operating Environment Warning 1. Do not use in atmospheres where the valve is in direct contact with corrosive gases, chemicals, salt water, water or steam. 2. Do not use in an explosive atmosphere. 3.

Assy Assy Ass y Ass y Assy Assy /PSE /ZISE10 (URL http://www.smcworld.com 41 - No.ZB-OM00301 / UP () 42 - No.ZB-OM00301 ZFAZFBZFC / 10 50 PD PD 43 - No.ZB-OM00301 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2013 SMC Corporation All

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

The buttons cannot be operated. 14 Product failure Replace the product. Check that the panel mount adapter and the product are correctly assembled. Mount the product on the panel correctly. Incorrect installation 15 The product is loose. Product failure Replace the product. Rework the piping.

The buttons cannot be operated. 14 Product failure Replace the product. Check that the panel mount adapter and the product are correctly assembled. Mount the product on the panel correctly. Incorrect installation 15 The product is loose. Product failure Replace the product. Rework the piping.

Compact and light W Existing model Heat Exchanger H Unit: inch (mm) D 10.4 (263) H W 5.1 (130) Model Weight 6.7 (170) HED003 17.6 lbs (8 kg) HED005 30.9 lbs (14 kg) 5.9 (150) 11.6 (294) 8.7 (222) D HED007 33.1 lbs (15 kg) Peltier device (Thermo-module) The outline dimensions do not include protruding parts such as the foot flange and tube.

42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) F I F RHC (mm) (mm) MK(2) M 30.5 32 41.5

The intersection C is the conversion value 17C under atmospheric pressure dew point. 14 16 Series IDF/IDU E Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage. The instructions indicate the level of potential hazard by a label of "Caution", "Warning" or "Danger".

Refer to front matters 42 and 43 for Safety Instructions, and pages 491 and 492 for High Purity Chemical Valve Precautions. Piping Caution Caution 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. 1. Connect tubing with special tools.

ME3 w/Head Square Mount 13 8 14 ME4 w/Cap Square Mount 14 8 14 MP1 w/Double Rear Clevis 14 8 14 MP2 w/Double Detachable Rear Clevis 15 8 14 MP3 w/Cap Fixed Eye 15 8 14 MP4 w/Single Detachable Rear Clevis 15 8 14 MS1 w/Foot Mount 16 8 14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion

ME3 w/Head Square Mount 13 8 14 ME4 w/Cap Square Mount 14 8 14 MP1 w/Double Rear Clevis 14 8 14 MP2 w/Double Detachable Rear Clevis 15 8 14 MP3 w/Cap Fixed Eye 15 8 14 MP4 w/Single Detachable Rear Clevis 15 8 14 MS1 w/Foot Mount 16 8 14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion

14 14 14 14 14 14 14 (5.5) (35) S0710-5 S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12

(mm) H (Width across flat) 8 10 14 8 10 14 8 10 14 17 12 14 17 12 14 17 22 14 17 22 19 22 Connection thread R, M Note 1) D M Weight (g) A L1 L2 Model 2 x Applicable tube L1 L1 M KQB2T23-M5 KQB2T23-01S KQB2T23-02S KQB2T04-M5 KQB2T04-01S KQB2T04-02S KQB2T06-M5 KQB2T06-01S KQB2T06-02S KQB2T06-03S KQB2T08-01S KQB2T08-02S KQB2T08-03S KQB2T10-01S KQB2T10-02S KQB2T10-03S KQB2T10-04S KQB2T12-02S

21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25