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D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

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Vacuum Module: Ejector System Series ZX

Release flow rate adjusting needle Ejector exhaust PV/V port size 05 07 0.5 mm 0.7 mm With silencer Port exhaust Rc Common exhaust (Manifold only) 1 Nil Nil Y M5 x 0.8 L Without lock nut 1 8 2 (1) 10 1.0 mm M6 x 1 (Option) With lock nut 3 (2) Vacuum switch electrical entry Note 1) When port exhaust is applied to the manifold, pilot exhaust is done by common exhaust.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil N Variations Model LVC20 LVC30 LVC40 LVC60 LVC50 Orifice diameter 4 8 10 22 16 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 19, 25 12, 19 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/4, 3/8 3/8, 1/2 3/4, 1 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05 07 11 13 19 1/8 3/16 1/4 3/8 1/2 3/4 Different diameter tubings can be selected within the same body class.

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 03 (Rcø3, NPT1/8), Port B OUT: 05 (NPT3/16), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 03 (Rcø3, NPT1/8), Port B OUT: 05 (NPT3/16), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 07 (1/4), Port B OUT: 05 (NPT3/16), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 4 (Indicator), Specification: V (Vacuum), Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 4 (Indicator), Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE-LVC40,50), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: 05 (NPT3/16), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 4 (Indicator), Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Size: 100 (M5 Basis), Applicable Tube OD: 05 (Ø3/16")

Body Size: 100 (M5 Basis), Applicable Tube OD: 05 (3/16")