Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

39.5) SV2000-21-6 (M3 x 46) SV3000-21-3 (M4 x 53) SV2000-21-5 (M3 x 60) 10-SV1000 SX3000-57-4 10-SV2000 SY5000-11-15 10-SV3000 SY7000-11-11 10-SV4000 SY9000-11-2 264 Single Unit/Sub-plate Type [IP67 Compliant] Series 10-SV1000/2000/3000/4000 How to Order 10 W1 00 1 1 5 SV U D Clean series Series Thread type 1 2 3 4 10-SV1000 10-SV2000 10-SV3000 10-SV4000 Nil F N T Rc G NPT NPTF Actuation

Air preparation filter

at outlet Note 5) Max 1mg/m3 (ANR)(0.8ppm) -12- Doc. no.

Hydraulic

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

ZP

M3 x 0.5 M5 x 0.8 Vacuum entry 6 Nylon tube 6 Urethane tube 4 tube 6 tube 10 to 32 M5 x 0.8 6 Nylon tube 6 Urethane tube 6 tube 8 tube M5 x 0.8 Rc 40, 50 1 8 2 to 8 10 to 32 40, 50 M8 x 1 Male thread M10 x 1 Male thread M14 x 1 Male thread Connection Buffer type Rotating (J)/Non-rotating (K) For 2 to 8 6, 10, 15, 25 mm For 10 to 32 10, 20, 30, 40, 50 mm For 40, 50 10, 20, 30, 50 mm Buffer

Nozzle Type Ionizer

mm) 0.1 0 0 120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal) 86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E

Ionizer Nozzle type IZN10 Series IZS

(mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32 7 25.8 Note 1) 11 Note 1) Dimensions of the resin part stated in Provide Grounding on page 454.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50

VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

MHZ2-10, 16, 20, 25 1122M3 x 0.5 M3 x 0.5 K Width across flats 5 2.6 8.5 2 x Y thread depth Z 10 accessory: Extension fitting assembly (2 pcs.)

MTS

+ Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part no.: MT-S8 Rod end nut part no.: NTJ-006A 8-10-14 14 Precision Cylinder Series MTS Dimensions: 12 MTS12 Basic style Note) Spline rods width across flats have nothing to do with the position of the body mounting face

90

to 24 VDC 10%, Ripple (P-P) 10% or less 15 mA or less 2% F.S.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

VQ20/30

VQ 1M1 2 3 X2 17-2-89 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Mounting hole 2-4.5 through A port C6: One-touch fitting for 6 C8: One-touch fitting for 8 DIN rail mounting 4-M3 x 0.5 Formulas L1 = (n 1) x 29 + 49 L2 = L1 10 L3 = L4 10.5 L5 = L1 11.2 Dotted line: DIN rail mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19

IDX-OM-W025

Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Maintenance . 10 2 Chapter 11 Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12

MXH

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20