Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

Large Flow Air Filter AF800/900 Series

Float type auto drain (N.O.) 2 1 Nil None 1 Optional filtration rate Metal bowl Nylon bowl Stainless steel element Metal bowl with level gauge Without drain cock 2 6 7 8 9 Thread type 3 Nil N F Rc NPT G Flow rate (L/min (ANR)) 4 Port size 12 14 20 2 1 4 1 AF900 (Representative Values) 1 2 1 Note 1) When specifiying more than one number, indicate them in numerical order.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Flow Rate and Effective Area AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 4 6 6 8 3.2, 4, 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values

ARJ310

Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) B C Panel type One-touch fitting feature introduced to series mm Weight Model A (Width) C (Depth) B (Height) Approx. 70g (Body: 65g) 4, 6 (metric size) 5/32", 1/4" (inch size) ARJ310-01G 18.3 Approx. 41 82.5 Approx. 75g (Body: 60g) ARJ210-M5G 18.3 80 Approx. 46

id_idw_and_ida_series_air_dyers

Series ID/IDW/IDA Heatless Air Dryers High Capacity Heatless Air Dryer Series IDA 73 86 114 170 205 295 409 591 818 1136 1909 2273 2955 4091 lbs Kg Weight 160 190 250 375 450 650 900 1300 1800 2500 4200 5000 6500 9000 A B C inch mm inch mm inch mm 610 610 711 787 813 838 1067 1168 1245 1524 1575 1575 1219 1575 24 24 28 31 32 33 42 46 49 60 62 62 48 62 711 864 813 940 914 1041 1143 1448 1524

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Note) Accumulated flow rate is reset when the power supply turns OFF. 46 Series PF2D How to Order 4-channel Flow Monitor Remote Type Display Unit PF2D20 M Output specification Option 2 (Refer to page 55.) 0 1 NPN4 outputs PNP4 outputs Accessory / Power supply output cable (2 m) Nil 4C None Sensor connector (4 pc.) Unit specification Option 1 (Refer to page 55.)

Clean Rodless Cylinder Series CYP

6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

Miniature Regulator Series ARJ310

Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) B C Panel type One-touch fitting feature introduced to series mm Weight Model A (Width) C (Depth) B (Height) Approx. 70g (Body: 65g) 4, 6 (metric size) 5/32", 1/4" (inch size) ARJ310-01G 18.3 Approx. 41 82.5 Approx. 75g (Body: 60g) ARJ210-M5G 18.3 80 Approx. 46

Uniaxial Electric Actuator Series LJ1

LJ1H202NAP.14~19 LJ1H30 Series. LC1-1B2H LJ1H202PCLJ1H202NC.P.21 Slider Guide LJ1S Series LJ1S10 Series. P.22~27 LJ1H202SCLC1-1B2M LJ1S20 Series. P.28~33 LJ1H202PFK LJ1S30 Series. P.34~39 LJ1H202NFK Option Specifications. P.40, 41 LC1-1B2V LJ1H202PAK Motor Reference Data, Nonstandard Motors . P.42~46 Order Made Specifications.

Digital Flow Switches Series PF2A

flow rate: l/min Accumulated flow: l, m3, m3 x 103 Port size Output specification Port size Applicable model Flow rate (l/min) 28 29 68 69 NPN open collector 1 output + Analog output (1 to 5 V) NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (4 to 20 mA) Symbol 3000 6000 12000 10 14

Electric Actuators

to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106 LJ1H202NC 14 56 to 740 to 930 to 600 to 500 to 1000 LJ1H303PD to 1000 to 1000 to 700 to 500 18 60 to 1000 126 114 108 LJ1H303ND 20

IDX-OM-Y002

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev AApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

IDX-OM-U010

Note 1: This product is hermetically sealed and contains fluorinated greenhouse gases (HFC). 7.2 Refrigerant and GWP value IDFC60/70/80/90 Series 7-2 IDX-OM-U010 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size B A E D G F C P J Unit: mm M N H K O L Unit: mm Model Port Size A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 46

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 14 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 14 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

NARM Series

NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81 2.56 3.31 4.06 4.80 5.55 6.30 7.05 7.80 (27) (46

Low Differential Pressure Sensor

ZS-27-C) Rotate 90 to mount. 14 Series PSE Specific Product Precautions 3 Be sure to read before handling. Set differential pressure range & Rated differential pressure range Caution Set the pressure within the rated differential pressure range. The set differential pressure range is the range of differential pressure that can be set on the controller.

PF2D

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Component Parts Material No. Description o !0 u !0 !2 w y r !