Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Centralized piping on right, Port Screw Type: G, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None,

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: NPT, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: NPT, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: NPT, Auto Switches: M9P, Lead Wire Length(m): 0.5, Lead Wire Connector: M8 3‑pin, The number of the switches: 2 pcs., Custom-made: Without auto

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Left-side centralized piping, Port Screw Type: NPT, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Centralized piping on right, Port Screw Type: NPT, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Centralized piping on right, Port Screw Type: NPT, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Centralized piping on right, Port Screw Type: NPT, Auto Switches: M9PW, Lead Wire Length(m): 3, Lead Wire Connector: None, The number of the switches: 2 pcs., Custom-made: Without auto switch

Load(kg): 12, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 14, Allowable Static Moment MB(N⋅m): 20, Allowable Static Moment MC(N⋅m): 14, Connection Diameter: Rc1/8, Piping Format: Centralized piping on right, Port Screw Type: NPT, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): None, Lead Wire Connector: None, The number of the switches: None

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

Stability of suction position,

ZP3EU-YF2JB10 [Weight: 209 g] ZP3EU-YF2JB30 [Weight: 225 g] ZP3EU-YF2JB50 [Weight: 237 g] Width across flats 14 Width across flats 14 ZP3 Width across flats 27 Width across flats 27 Bushing Bushing ZP3E ZP3E 35 9 9 A B 9 9 35 B A ZP2 Bushing Bushing ZP2V M18 x 1.5 M18 x 1.5 D-D D-D M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 ZP 14 14 ZPT ZPR D D D D 17 17 16 16 24.1

V

25.8 23.3 13 5 ASV220F-M5-04 4 M5x0.8 8 9.5 9.6 22.8 27.6 11.1 31.4 28.6 27.7 24.9 13 8 ASV220F-M5-06 6 M5x0.8 8 11.5 9.6 23.9 28.7 11.1 31.4 28.6 27.7 24.9 14 9 * Assembled height (N)ASV 0 F B O D Y S I Z E 1 M3 2 M5 3 18 4 14 5 38 D I M E N S I O N S S E R I E S (N)ASV T E E T Y P E S Y M B O L S W I T H B U I LTI N S I L E N C E R B O D Y T Y P E 1 Tee 2 Elbow P O R T T H R E A D M3

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

ZSE20(F)_ISE20

female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts are in both English and

VS 8-2/VS 8-4

14 14 14 CLEAR 0 131 8 115 SW IN AUX -ERR PWR COM 33.5 66 -ERR HOLD 1 0 ADDRESS SETTING ADDR2 ADDR1 2 EX250 3 1 12 12 12 12 SMC 4 x M5 mounting holes SI unit Input block Formula: L1 = 27n + 85, L2 = 27n + 204 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 9 328 447 112 231 1 166 285 301 420 8 274 393 10 355 474 11 382 501 12 409 528 13 436 555 14 463 582 15 490 609 16 517 636 6 5

SYA3000/5000/7000

M5 x 0.8 0.42 0.47 0.13 0.47 [0.44] 0.41 [0.37] 0.13 [0.12] 3 position 39 0.50 [0.41] 0.48 [0.35] 0.15 [0.11] 0.47 0.43 0.13 44 46 Single Double 2 position 0.29 0.18 0.64 0.34 0.72 0.17 0.28 0.15 0.59 0.30 0.59 0.15 C4 Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46

5 Port Air Operated Valve SYA3000/5000/7000 Series

M5 x 0.8 0.47 0.13 0.47 [0.44] 0.41 [0.37] 0.13 [0.12] 0.42 3 position 39 0.50 [0.41] 0.15 [0.11] 0.47 0.43 0.48 [0.35] 0.13 44 46 Single Double 2 position 0.72 0.18 0.64 0.34 0.29 0.17 0.59 0.15 0.59 0.30 0.28 0.15 Closed center Exhaust center Pressure center C4 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.