3 Position Cylinder Series RZQ RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75M5 x 110 L 110 M5 x 135 L 8 9.5 135 M5 x 160 L 160 RZQ32-12-S7515 2 pcs. M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.
When the product is mounted using the bracket, fix with M5 screws (2 pcs.) or equivalent. The Bracket thickness is approx. 1.6 mm.
NN NN MM MM KK LL KK LL 2 x PA (Port for operating cylinder) J I J 2 x PA (Port for operating cylinder) F F F 76.5 91 110 H 73 88 106 J 40 46.5 55 K 46 58 68 M 13 15 19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5
. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.
30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.
(Refer to the figure below.) 0.061 0.053 0.062 34 20 0.076 0.066 0.074 38.5 25 0.076 0.066 0.074 41 30 0.047 0.041 0.109 28.5 5 0.047 0.041 0.109 31 10 0.080 0.069 0.169 36 15 MXU10 9.5 0.080 0.069 0.169 38.5 20 0.103 0.089 0.212 44 25 0.103 0.089 0.212 46 30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25
x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.
x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.
27.6 0.05 35 18.6 (34.6) 2 x M5 x 0.8 thread depth 8 (Mounting thread) 4 x M5 x 0.8 thread depth 10 (Mounting thread) Prepared hole dia. 4.3 through (Mounting hole) +0.030 0 depth 4 4H9 7.5 0.02 8 0 0.1 (58) 30 42 32 MHZ 16.8 0.02 MHF MHL 29 +0.052 0 depth 3 21H9 When closed 16.3 0 0.7 When open 26.3 +2.2 0.2 18 20 43.5 MHR 84.8 MHK 2 x M5 x 0.8 thread depth 10 (Mounting thread) MHS M5 x
(A, B port) C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 20 237 229 19 226 218 17 204 196 15 182 174 13 160 152 11 138 130 9 116 108 7 94 86 6 83 75 18 215 207 5 72 64 16 193 185 4 61 53 14 171 163 3 50 42 12 149 141 L2 L1 2 39 31 10 127 119 8 105 97 637
MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread
1.2 46 1.2 M5 x 0.8 M5 x 0.8 4 x 10 Finger opening port Finger closing port Close: 0 +0.1 0 MHL E-E Open: 801 MHR 8 x M4 x 0.7 thread depth 4 MHK 128 (Attachment mounting thread) (Mounting thread) 4 x M6 x 1 thread depth 6 MHS MHC Auto Switch Mounting Groove Dimensions MHT 52 24 MHY 2.3 MHW 4 2 x 3H9 +0.025 0 depth 3 6 -X 30 8 30 8 3 MRHQ 2 x M6 x 1 thread depth 6 (Mounting thread) MA Groove
+0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x
1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 144 12-3-23 24 Series MHF2
x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 14 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: C4 (ø4 One-touch Fitting)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 13 Stations, A B Port Size: C4 (ø4 One-touch Fitting)