FILTER REGULATOR

Recommended tightening torque: M5 added. Round type pressure gauge Applicable tool size correction. '18.3 B Added note of "piping". Corrected tightening torque.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

IR1000/2000/3000

Description IRV1000 IRV2000 IRV3000 Bracket P53801018 P53802016 P53803013 Pressure gauge GZ33-K-01 GZ43-K-01 GZ43-K-01 Precision of pressure gauge within 3% (Full span) 14-5-17 17 Series IR1000/2000/3000 Construction !5 !5 t o o o !0 t !0 o !

HRX-OM-X084

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMElectric conductivity control function

HRX-OM-X071

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMWith electric conductivity control function

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

Floating Joint/Stainless Steel Type Series JS

23 41 7 14 14.3 27 49.2 14.3 1 11000 3

VPA4

-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm 5-3-26 3 Dimensions VPA4150-Bottom ported SA VA SA 4-Rc 1/8 pilot port (5-Rc 3/8,

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

3 @2 @0 #3 #4 #5 1212 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 17 18 20 21 22 23 24 26 27 28 29 33 34 38 39 40 41 42 43 Description Material Note Aluminum alloy Aluminum alloy Special resin Aluminum alloy Aluminum alloy Aluminum alloy Special resin Special resin Special resin Stainless steel Sintered iron material

Micro Mist Separator Series AFD20/30/40

Metal bowl PPA Applicable model Metal bowl with level gauge Metal bowl AL Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S (mm) With bracket Accessory specifications With auto-drain Port size Standard specifications Model M 2.3 2.3 2.3 2.3 B 115 170 204 208 L 40 53 70 70 H 22

3

Qty. 1 2 3 4 PVC pipe Seal Body Sensor PVC pipe (25A) PVC pipe (30A) 1 1 CPVC ZS-40-U25 ZS-40-U30 1 FKM PPS PPS 25A retaining plate (M5 x 80 with two hexagonal socket head cap screws) ZS-40-U25-A 1 5 30A retaining plate (M5 x 65 with two hexagonal socket head cap screws) PF3W ZS-40-U30-A 1 Replacing the PVC pipe may cause accuracy to fluctuate by 1 to 2%. 3-Color Display Digital Flow Monitor

VZM400

Main valve/Rc (6A) Lubrication VA 1 8 Port size Pilot valve (EXH)/M5 x 0.8 Option Foot bracket (2) VM Weight (Basic) 150 g Please contact SMC for manifold mounting style. Note 1) External pilot type Main valve: 0 to 1.0 MPa Pilot valve: 0.15 to 1.0 MPa Note 2) The standard body can not be retrofitted with a foot bracket. VR VH VHS Model Actuator part no.

MIST SEPARATOR

B 1/4 17 HEX. : 17 16 Option Semi-standard Semi-standard Semi-standard Part no. Part no. Port thread Port thread Rc Rc C4LF-8J-A G G C4LFF-8J-A NPT C4LF-8(Z)-A NPT C4LFN-8J(Z)-A C4LF-8-A External appearance drawing and part no. B B B 1/4 HEX. : 17 17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

MICRO MIST SEPARATOR

B 1/4 17 HEX. : 17 16 Option Semi-standard Semi-standard Semi-standard Part no. Part no. Port thread Port thread Rc Rc C4LF-8J-A G G C4LFF-8J-A NPT C4LF-8(Z)-A NPT C4LFN-8J(Z)-A C4LF-8-A External appearance drawing and part no. B B B 1/4 HEX. : 17 17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

High Vacuum L Type Valve

44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

ML1

Applicable auto switch Electrical entry Page Style Model Indicator D-E7lA Reed switch Grommet (In-line) Yes 5.3-24 D-E80A No 5.3-24 D-M5 Yes 5.3-41 MK/MK2 Grommet (In-line) Solid state D-M5lW 5.3-47 Yes (2 color indication) D-M5lTL RSQ/RSG 5.3-62 Yes (With timer) RSH Precautions CE1 Be sure to read before handling. Refer to p.0-44 to 0-46 for common precautions of auto switch.

NARM Series

End plate ass'y 1 pc. 2500 3000 A B 146 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM2500, 3000 P Dimensions Symbol A B C D E F G H I J K L M N O P Model NARM2500 .24 .67 1.73 2.20 1.65 4.98 2.28 1.77 .67 .83 1.50 1.65 1.14 1.89 2.68 1.32 (6) (17) (44) (56) (42) (126.5) (58) (45) (17) (21) (38) (42) (29) (48) (68) (33.5) NARM3000 .28 .83 2.13 2.68 2.17 6.04

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

VNH

2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36