Compact Cylinder with Lock Series CLQ

Load voltage Auto switch model Perpendicular Lead wire length (m) 0.5 (Nil) Indicator light Wiring (Output) Applicable load Pre-wired connector 1 (M) Type Special function Electrical entry In-line 3 (L) 5 (Z) None (N) AC DC 32 to 100 20, 25 40 to 100 20, 25 32 M9N M9P M9B M9NV M9PV M9BV 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12V 5 V, 12 V 12 V 5 V, 12 V 12 V Solid

Wedge Cam Operation Provides

17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.

HRX-OM-S004

4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-6 Cooling capacity(HRS150-A-20/40/46/46-) 8.4 Cooling capacity HRS Series 8-12 HRX-OM-S004 Chapter 8 Documents : Facility water temperature 32 oC 8.4.3 HRS100-W-20/40/46: Facility water temperature 40 oC 14 14 12 12 10 10 Cooling capacity [kW] Cooling

HRX-OM-T002

AL45 Compressor over current *12 AL47 Pump over current AL50 Incorrect phase error AL51 Phase board over current *12: Water-cooled type model does not generate this alarm.

HRX-OM-Q026

Threshold for alarm generation generation and other settings Code Alarm name A.RUN P.RUN A.STP Display Default Settable OFF Display range AL39 Internal unit fan stoppage Set time AL40 Dust-proof filter maintenance 500 h 1 to 9 h 12 AL41 Power stoppage AL42 Compressor standby AL43 12 Fan breaker trip AL44 12 Fan inverter error AL45 Compressor breaker trip 13 AL46 Compressor inverter error

Mist Separator Regulator

Plug Assembly Replacement 37 12. Disassembly Drawing 38-39 13. Dimensions 40-41 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Ｍ icro Mist Separator Regulator

Disassembly Drawing of the Pressure Gauge Port [Applicable model: without pressure gauge / with pressure gauge (round type)] (12) Plug assembly (12) Plug assembly (3) Pressure gauge (round type) Micro mist separator regulator 12-3.

Thermo-chiller/Rack Mount Type

, Ion exchange resin*12 Temperature range [C] 5 to 40 Pressure range [MPa] 0.3 to 0.5 Required flow rate (50/60 Hz)13 [L/min] 8 12 Facility water system Inlet-outlet pressure differential of facility water [MPa] 0.3 or more Port size Rc3/8 Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Synthetic rubber Power supply Single-phase 100 VAC (50/60 Hz), 115 VAC

NCQ8

Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire

HRX-OM-X010

See 5.3.16 Initial Setting screen 1 (page 5-19) for details. 5.3 Operation Screen HRZ Series 5-12 HRX-OM-X010 Chapter 5 System Operation 5.3.10 Control Setting screen 2 POWER ON 1 2 Figure 5-12 Control Setting screen 2 Table 5-10 Control Setting screen 2 No.

Filter Regulator

Product (15) Plug assembly -40- 12Disassembly Drawing 12-1. AW20-D / AW30-D / AW40-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring (Protrusion on IN side) Pressure regulating screw assembly Valve guide (7) Element Pressure regulating spring (11) Baffle (12) Diaphragm assembly OUT I N (8) Bowl seal Body I N (9) Bowl assembly -41- 12-2.

Electric Actuators

4 Nickel plated 8 Bearing stopper Motor plate Guide ring Bearing Bushing Soft wiper Anodized Size 10 only 9 10 11 12 13 !2 e w i !1 t !

LFE-OMY0008

6 1.6 115 106 M N O P Q R S T U LFE13 48 39 4.6 12 11.5 52 28 2.5 8.5 2 45g LFE14 48 39 4.6 12 11.5 52 28 2.5 8.5 2 45g LFE26 62 53 4.6 9.5 14 56 38 2.5 8.5 2.6 70g LFE38 62 53 4.6 3.5 20 68 43 2.5 8.5 2.6 70g 8mm0.70.8Nm 71 No.LFE*-OMY0008 M12 M12 M12 M12 (LFE (LFE (LFE (LFE-1 1 1 1-A3) A3) A3) A3) ( ( ( ( )3 )3 )3 )3 4( 4( 4( 4( ) ) ) ) ( ( ( ( )2 )2 )2 )2 1( 1( 1( 1( ) ) )

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

135.5 143.5 175 185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 7 83 91 112.5 123 8 93.5 101.5 125 135.5 9 104 112 137.5 148 3 41 49 75 85.5 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 L1 L2 L3 L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port size 41 (12) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting

Direct Solenoid

cdptlon #11 Manitold glock *41 Manitold glock *'23 Manifold Block ir28 Manitold Block 1 g 1C 1 D H$?

LJ1H

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean

Compact Vacuum Unit Ejector/ Vacuum Pump System

(N.C.) port Port size Rc1/8 Supply from one side 10 NPT1/8 12 12 Supply from both sides 12 G1/8 Supply from one side 10 8 10 M50.8 Supply from both sides 12 10 12 Note) The number of stations shown above is to satisfy the specifications of the ejector performance at the standard supply pressure.

Digital Flow Switch (Integrated display type)

L/min (250 L type) [ P_2] Set value (OUT2) [F 2]/[ oUt2] Page 41 5% of maximum rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_2] Hysteresis (OUT2) [F 3]/[ RES] [ rES] Response time setting [ 1 .00] 1 second Page 45 [ oUt] Display of set value (OUT1) (Without temperature sensor) [

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B [110] 81 35 Light (For TL, TZ) Max.12 31.3 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 NO NO PE PE [243] 237.6 239 228.5 213 31 31 130 130 52 52 41 41 105 105 [ ]: With indicator light (TL, TZ) 1312 Note) CE-compliant: D/DO only (Electrical entry) VP3145/3165/3185 Series Made to Order [Option] Please contact SMC

Heavy Duty Stopper Cylinder Series RSH/RS1H

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41