LX

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy ( ) 50 to 100mm stroke Non-rotating accuracy ( ) 0.09 1 0.1 10 50 100 Eccentric

Rotary Table/

84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1

Air Fittings Fitting Series For Special Environment

L A D KRH06-02S KRH06-01S 1 8 10.8 15.8 27.8 21.9 19.9 26.9 20.3 12 20.5 24.5 1 4 18.5 19 19 5.7 6 14 17 15.5 25 3 8 1 8 KRH06-03S 26 18.0 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 30 28.5 25.5 32 35.5 31 29 36.5 35 32 Reference dimensions after R(PT) thread installation. 14 1 4 3 8 1 8 1 4 3 8 22.5 19 28 29.5 24.5 17 8 20.5 17 17 20.8 31.3 29.5 10 23 1 2 KRH10-04S 21 54.3

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

HRX-OM-T002

after power failure . 5-27 5.10.2 Setting/checking of the operation restoration function . 5-28 5.11 Anti-freezing function . 5-29 5.11.1 Anti-freezing function . 5-29 5.11.2 Setting/checking of anti-freezing function . 5-31 5.12 Key Operation Sound Setting . 5-32 5.12.1 Key operation sound setting . 5-32 5.12.2 Setting/checking of the button operation sound . 5-32 5.13 Temperature unit

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (Non-locking) 2-Rc 1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5

VKF300

Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198

Pin Cylinders Series CJP2/CJP

19 7 31 27 12 16.5 22.5 29 M5 x 0.8 NN R 5st 10st S 15st W Q 5st 10st Z Bore size (mm) 4 6 10 15 Q G C 15st K H 2 39.5 31.5 23.5 3 32 24 16 7 M8 x 1.0 Hose nipple A W F E S Z H Refer to page 38.

New

35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q R S Q R S T 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 64.5 67 67 67 69.5 69.5 69.5 36

Fieldbus system EtherCAT compatible SI Unit

VDC. 17 Power supply voltage level for output is below 19 VDC. 18 19 Disconnection between the units.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV220F-U10/32-03 ASV220F-U10/32-07 5/32" 1/4" 10-32 UNF 10-32 UNF 8 8 9.3 12 9.6 9.6 22.8 23.6 27.6 28.4 11.1 11.1 31.4 31.4 28.6 28.6 27.7 27.7 24.9 24.9 12.7 13.7 8 9 Reference U10/32 thread dimensions after installation.

Possible to transfer a workpiece at low-speed.

67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 10 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M 8 x 1.25 12 M5 x 0.8 M 8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

Modular F.R.L. Unit

E Octagon Port size C T-interface B F.R.L. body center D A Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable models AC10, AC10B AC20, AC20B AR20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C C 12 D 14 E 8 B 19 A 11 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 Mounting-Caution

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8 39.4 28.5 45.2 38 46.8 48.9 1/4 37.9 43.7 45.3 3/8 40.9 46.7 48.3 30 1/4 39 31.1 44.7 41 46.3 51.9 3/8 42 47.7 49.3 19 Direct Operated 2-Port Solenoid Valve JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port

Micro Mechanical Valve Series VM1000

F.O.F. 40 4N Push button VM1000-4N-32 VM1000-4NU-32 VM1100-4N-32 VM1100-4NU-32 Symbol/2 port 3 port Panel mounting hole (A) 2 (A) 2 12 12 10 10 1 (P) 3 (R) 1 (P) Max. 5 0.5 MPa supply Applicable tubing VM1100-4N-32 VM1000-4N-32 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port VM1100-4NU-32 VM1000-4NU-32 T.T. O.T. P.T.

V

F:M6x1 Model A B C Y ZPT25U C 25 28 14 3 19 25 45 8 3.5 24 15 40 12 4 1.8 D E G D E G ZPT32U C 32 35 14.5 3 19.5 25 45 8 3.5 24.5 15 40.5 12 4.5 2.3 ZPT02U 2 2.6 1.2 D E E P T Y P E 0.8 ZPT04U 4 4.8 1.6 3 19 7 4 20 8 ZPT06U 6 7 H:M6x1 H:M8x1 2.5 Model A B D Y ZPT08U 8 9 1 A E F G I C E F G I ZPT25D 25 28 20 3 25.5 25 51 8 3.5 30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Air release NA NB S + Stroke X X LS + Stroke Y Y LX ZZ + Stroke LZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41