MGC

45 170 110 80 M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12 37 10.5 194 42 19 23 142 Bore (mm) WH W V U T S R Q J O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

ML1C

Model M1 M2 M3 W1 W2 W3 W4 ML1C25 14.7 4.90 4.90 20 12 3 10 ML1C32 29.4 9.80 9.80 32 19 5 16 ML1C40 58.8 19.6 19.6 50 30 8 25 Caution on Design ML1C/M1 Allowable moment and Load Mass Maximum Allowable moment and Maximum load mass varies depending on mounting orientation, piston speed, etc.

RZQ

Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD LG 32 30 107.7 82.5 18 6.6 4 66.5 Special cap bolt 40 33 92 76 117.2 18 6.6 4 50 39 96.5 73.5 126.7 22 9 5 LY RE A B 63 46 102 76 138.2 28 11 5 LH REC Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke LG CX LZ LX 4-LD 32 57 57 71 11.2 5.8

Series CE1

27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X 1.25 61.5 35 19 Rc(PT) 1

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

: 3.5MPa Series CHQB B 32 to 100 D-A9 D-F9 D-F9W A Approx.

•

97 115 128 I 128 52 62 204 19' 212 2.?5 I 225 83 , 97 107 63 70 83 11 5 128 128 52 62 204 19' 212 225 I 225 , Fitting Dimensions Pin : Cl K040-23-54806 Double knuckle joint Single knuckle joint He,_ +0027 -'-0027 Hexagon socket set screw f12~ M6X "' 12 K8 a socket set screw \ ~ . M6x6 .;d-.,~('~~gi '-""-qOrl _ ___ .!

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

BA 0 0.3 CA BA 0 0.3 Drawing of view E Bore size (mm) S NA Z NB H CA GA BA CB GB 14.5 4.5 1.6 24 6 15 15 3 8 12 11 28 17 24.5 7 85.5 M3 x 0.5 14 32 57.5 T 3 M8 x 1.0 NN FB FC FT FX MM FY FZ GC F D BB A 20.5 20.5 9.5 9.5 83 82 M5 x 0.8 M4 x 0.7 55 54 M12 x 1.0 M10 x 1.0 28 28 17 20 5 5 16 10 15 15 18.3 15 18.3 12 20 14 5 4 8 8 5 5 11 11 17.5 19 5.5 5.5 2.3 2.3 33 33 20 20 42 42 With air

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Output p. 26 Functions p. 26 Internal Circuits and Wiring Examples p. 27 Dimensions p. 28 3-Screen Display High-Precision Digital Pressure Switch/ IO-Link Compatible ZSE20B(F)-L/ISE20B-L Series How to Order p. 15 Specifications p. 16 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 19

Antistatic One-touch Fittings Series KA

13.1 13.1 10 Uni thread 3 8 KAH06-U03 17.5 11.5 16 1 8 1 4 KAH08-U01 KAH08-U02 25 21.5 20.5 15.5 11 27 14 14 8 18.5 18.0 18.0 3 8 KAH08-U03 17 19.5 13.5 33 1 8 KAH10-U01 28 23 17 1 4 3 8 KAH10-U02 KAH10-U03 22 18 17 10 17 21 29.5 29.5 24 14 1 2 KAH10-U04 22 14 28 22 16 22 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 12 19 22 46.1 46.1 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions

PSxx-OMM0002CN

No.PS-OMM0002CN-F / / ZSE80(F) ISE80(H) 2 9 10 11 14 14 16 17 19 19 21 21 21 F0 23 F1 OUT1 24 F2 OUT2 27 F3 27 F4 / 28 F5 30 F7 31 F8 32 F9 34 F10 35 F98 36 F99 38 39 42 42 43 50 50 52 -1No.PS-OMM0002CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

Ejector Valve Unit Series ZYY/ZYX 1

Hook Covering ZSE1-18, -19 Pressure setting trimmer 1 Pressure setting trimmer 2 3.

EXxx-OMW0014CN

SI 2 16 16 Valves32 32 Valves 2 4 D 012 31 Byte 16 Valves 32 Valves 0 Valve coils 0-7 Valve coils 0-7 1 Valve coils 8-15 Valve coils 8-15 2 Valve coils 16-23 3 Valve coils 24-31 . 6-3 39 No.EX-OMW0014CN-A 6.4.

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

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Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table Dimensions: MXP12 1122Z 3 Metal stopper V K Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

8.5 24 60 0.5 18 3 21.5 2 20 4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 M4 x 0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3