XLGR Series

Model XLGR-80*-1* XLGR-100*-1* XLGR-160*-1* Valve size 80 100 160 Main exhaust valve Double acting (pressurized to open / close) Actuating type Bypass valve Normal close (N.C.)

Thermo-con

(20C) Ambient temperature: 95F (35C) 600 1200 Ambient temperature: 86F (30C) 500 1000 Ambient temperature: 59F (15C) 400 800 Ambient temperature: 59F (15C) 300 600 200 400 100 200 0 0 0 0 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 Circulating fluid temperature Circulating fluid temperature Pump Capacity (Thermo-con Outlet) The pressure on

Refrigerated Air Dryer

Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

NPT 80 mm G 100 mm Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

ChemicalThermo-con

Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) HED003 HED005 60 80 100 120 140 F 40 60 80 100 120 140 F 40 1600 800 Facility water: 95F (35C) Heating capacity (W) Heating capacity (W) 1200 Facility water: 95F (35C) Facility water: 77F (25C) Facility water: 77F (25C) 600 800 400 400 200 Facility water:

HRX-OM-Q026

90 100 110 120 Circulating fluid flow [L/min] Fig. 8-16: Pump capacity (HRSH100-A-20/40-, HRSH100-W-20/40-) 8.5.2 HRSH150/200-A-20/40HRSH150/200/250-W-20/400.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-

ARM10/11

150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate

ARM10/11

150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate

Digital Flow Switch (Integrated display type)

(at 80 mA load current) PNP: 1.5 V max. (at 80 mA load current) Response time 25 0.5 s/1 s/2 s Output protection Short circuit protection Flow Selects one of the output (hysteresis or window comparator mode), the output for the Output mode accumulated flow and the accumulated pulse output.

HRL

90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet

1

The chart on the left illustrates the example when 100 [kPa], F.S. = 100 0 = 100 [kPa], 3.0% F.S. = 100 x 0.03 = 3 [kPa]. It means that if the tempareture is changed within the range of 0 to 50[C], the error will occur at the max. 3 [kPa].

MY1B

Contact SMC when the solid state auto switch is retrofitted. 10 16 20 25 32 40 50 63 80 100 Standard type 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Type Bore size Symbol Centralized piping type Nil G Number of auto switches M thread Rc NPT G 10, 16, 20 Nil Note) For 10, only G is available. 25, 32, 40, 2 pcs. 1 pc. n pcs.

PFxx-OMS0001CN

-46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

LVQ

B A V S 37.5 6 7 20 25 80 D V S 50.2 10 7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.

Cylinder with Turntable ø63, ø80, ø100 Series MGT

15.53) 10.08 (5.88) 16.12 (11.08) 23.55 (16.07) 10.83 (6.14) 17.06 (11.46) 24.88 (16.60) 11.59 (6.39) 18.00 (11.83) 26.21 (17.14) 13.10 (6.90) 19.87 (12.58) 28.87 (18.22) MGTL63 to 100 (Ball bushing bearing) MGTM63 63 80 0.08 0.13 0.14 0.19 0.24 0 MGTM80 80 100 0.09 0.14 0.14 0.19 0.25 0 MGTM100 100 (kg) Standard stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 6.62 (4.33) 12.03

Clean Air Module

L/min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60 0.2 MPa 50 60 40 40 30 20 20 10 0.1 MPa 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) LLB4-1-P1R1VSF: High Flow Type (500 L/min) 500 600 Set pressure 0.4 MPa 0.3 MPa 500 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 400 400 300 0.2 MPa 300

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

Bernoulli Gripper

140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 300 200 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 250 160 140 200 120 100 150 80 100 60 40 50 20 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6

PFxx-OMP0001CN

. -18No.PF-OMP0001CN-F PNP(2 ) PFMB7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V) PFMB7--EPNP(1 )(420 mA) PFMB7--FDC(+) OUT1 DC(-) 80 mA 1.5 V E15 V 1 k F420 mA 600 PNP(1 ) PFMB7--HDC(+) OUT1 DC(-) 80 mA 1.5 V 0.4V ()30 msec. -19No.PF-OMP0001CN-F NPN(2 ) PFMB7--ANPN(1 ) PFMB7--CPFMB7--DNPN(1 ) PFMB7--GOUT1 OUT2 (PFMC7--A-) DC(-) PNP(2 ) PFMB7--BNPN(1 ) PFMB7--EPFMB7--FPNP(1 )

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load N 12 12 12 L = 100mm L = 100mm L = 100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load