Compact Cylinder with Air Cushion

28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32 100 I-G10 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 Y-G10 22 32 100 79 Knuckle pin and snap ring are included.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DR1 U1 NZ NX NDH10 NL NL NO U1 NO NX R1 Part no. Applicable pin Part no.

RQ

28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 IY-G10 32 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

CNA

Material: Cast iron ND H10 d9 Cotter pin Applicable bore size (mm) E1 L1 MM RR1 U1 ND NX NZ L Cotter pin size Flat washer size Flat washer MM A1 Part no. 3 x 18l Y-04C 40 +0.3 +0.1 16 22 M14 x 1.5 24 55 13 25 12 38 55.5 Polished round 12 NX NZ E1 L 3 x 18l +0.3 +0.1 16 50, 63 Y-05C 27 M18 x 1.5 28 60 15 27 12 38 55.5 Polished round 12 4 x 25l +0.3 +0.1 28 80 Y-08C 37 M22 x 1.5 36 71 19 28

MTS

28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55)

Digital Flow Switch (Integrated display type) ( compatible)

49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -103No.PF-OMV0006-B PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31

LV50-OMQ0002

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the mounting screws and brackets may become loose. The product body is made of resin.

LFE-OMZ0011

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the piping may become loose. The product body is made of resin.

HRX-OM-X027

Table 3-4 Piping port size Name Port size*1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more 1.0MPa more Automatic water-fill port *2 Rc3/8 22 to 24Nm (Automatic water-fill pressure 0.2 to 0.5MPa) Overflow port *2 Rc3/4 28 to 30Nm Inside diameter 19mm more of piping

HRX-OM-O021

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc1/2 28 to 30Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc1/2 28 to 30Nm 1.0MPa more Automatic water-fill

MLGP

Flat head watchmakers screwdriver Hexagon wrench key 2 Auto switch mounting bracket BMG1-040 Hexagon socket head cap screw (M2.5 x 8l ) Switch mounting screw (M2.5 x 4l ) (Included as accessory) Auto switch Hexagon wrench key 2.5 Hexagon socket head cap screw (M3 x 16l ) Auto switch 9-11-28 28 Compact Guide Cylinder with Lock Series MLGP Operating Range Auto switch model Bore size (mm) 25

Free Mount Cylinder for Vacuum Series ZCUK

23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5 38. 5 47. 5 51. 5 ZH 76. 5 54. 5 67. 5 63. 5 72. 5 DQ HQ HP 43 35 67 27 42 74 53 53 36 68 34 47 79 43 28

Compact Cylinder with Lock Series CLQ

40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Clamp Cylinder Series CK1

D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ BA8-032 Dimensions 25 28 5 6 12 3 x Rc 1/8 3 x Rc 1/8 9.5 20 4 Speed controller valve Cushion valve 4 32 12 4 45 45 M10 x 1.25 Max. 26.5 12 40 26 41.5 Width across flats 36 12 R12 12 +0.5 +0.2 Shaft: 10 0.040 d90.076 28 26 Hole: 10 +0.022 H8 0 41.2 38 5 20 34 + Stroke 70 + Stroke 55 137 + Stroke Double knuckle joint Single knuckle joint 10 +0.022 H8 0 3

SQ1000/2000

Dimension L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No. Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 50 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications.

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

Compact Cylinder with Air Cushion Series RQ

40 M18 x 1.5 16 20 20 28 40 M18 x 1.5 16 20 44 50.6 14 22 56 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 28 IY-G08 71 21 38 50 M22 x 1.5 21 27 23 38 50 M22 x 1.5 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 32 IY-G10 79 21 44 55 M26 x 1.5 24 31 24 44 55 M26 x 1.5 24 31 64 72 22 32 79 Knuckle pin and retaining ring are included.

3

22 32 40 50 4.5 5 1.5 78 54 30 60 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 3/8, 1/2 34 30 42 48 58 4.5 5 1.5 98 71 38 68 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 1/2, 3/4 44 36 48 58 70 5.5 7 2.0 124 92 46 77 62.6 57.6 23.0 41 42 63 48 28 18.0 3.5 depth 14 3/4, 1 104 74 31 52 39.5 1 1/4, 1 1/2 PF3W721/521 108 76 56 91 76.6 71.6 28.5 54 33 54 41.5 25 27.5 3.5 depth 14 G1 1/4

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB