IDX-OM-O004C

2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.7 . 2-5 2.3 . 2-6 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-2 4 4.1 . 4-1 4.2 . 4-1 4.2.1 () . 4-1 4.2.2 . 4-1 4.2.3 . 4-1 4.2.4 . 4-2 5 5.1 . 5-1 6 6.1 . 6-1 6.2 . 6-2 6.3 . 6-2 6.4 . 6-3 7 A 7.1 . 7-1 7.2 . 7-1 7.3 . 7-1 7.4 . 7-1 8 C 8.1 . 8-1 8.2 . 8-1 8.3

MTS

30 25 20 15 10 5 D-A9 x x x (2) 2 pcs. on same side Standard piping type(1) D-M9, D-F9W x x (2) D-A9V x x x D-A9 (2) x 1 pc. each on 2 sides D-M9, D-F9W (2) 2-port size D-A9V x D-A9 (2) x x x 2 pcs. on same side Axial piping type D-M9, D-F9W (2) x x D-A9V x x x D-M9V, D-F9WV x x D-F8 D-A9 x (2) 1 pc. each on 2 sides D-M9, D-F9W (2) D-M9V x 2-port size D-M9V, D-F9WV D-F8 Note 1) With the

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

position single JIS symbol 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion 2 x M5 x 0.8 Relief port RA GA WA RA GA WA Cushion valve (Width across flats WH) Cushion valve (Width across flats WH) 10 10 20 20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19

IDX-OM-Y002

1-3 1.3 Waste Disposal . 1-5 1.4 Limited Warranty and Disclaimer/ Compliance Requirements . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Name and Function of Parts . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 Transportation . 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Installation . 3-2 3.2.3 Air piping . 3-3 3.2.4 Replacement of auto drain . 3-4 3.2.5 Electrical

CM2

2 !3 !4 !5 !6 !

Ionizer

With 2 pcs.

Angle Seat Valve /

control equipment 2.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

VCB

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult SMC regarding other voltages.

ITV

35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications Contact SMC regarding detailed dimensions

MQQ

M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4

Compact Cylinder with Lock Series CLQ

(2 color indicator) IC circuit 5V, 12V 3 wire (PNP) F9PWV F9PW F7PW F9BWV F9BW J79W F7BWV Grommet 12V 2 wire Water resistant (2 color indicator) With timer With diagnostic output (2 color indicator) Latch type with diagnostic output (2 color indicator) Lead wire length symbols 0.5m .

MQQ

2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

70astamb1

2 (2 pcs.), !3, !4, !6 NCA Specifications DSeal kit includes !2 to !4, !6. Order the seal kit, based on each bore size.

mb1

2 (2 pcs.), !3, !4, !6 NCA Specifications DSeal kit includes !2 to !4, !6. Order the seal kit, based on each bore size.

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

LG1H

(B contact) 2 pcs. Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

CLQ

port VH Q 2 x 2-9 counterbore depth 7 H thread effective depth C 5.5 2-5.4 through M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 K M E S 3.2 2 x 2-M5 x 0.8 3.2 Head side cylinder port