Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Aluminum with Level Gauge] Metal Case with Level Gauge, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 1 1/2, Accessory: None

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 1,000, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 1 1/2, Accessory: None

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 1 1/2, Accessory: None

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 1,000, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 1 1/2, Accessory: None

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 1,000, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 1 1/2, Accessory: None

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Aluminum with Level Gauge] Metal Case with Level Gauge, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Metal] Metal case, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 1 1/2, Accessory: None

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Aluminum with Level Gauge] Metal Case with Level Gauge, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body:

Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 1 1/2, Accessory: None

Flow Rate: 650 scfm, Port Size: 2", Element Grade: 1 Micron

Flow Rate: 650 scfm, Port Size: 2", Element Grade: 5 Micron

Flow Rate: 650 scfm, Port Size: 2", Element Grade: 0.01 Micron

Flow Rate: 650 scfm, Port Size: 2", Element Grade: Activated Carbon

mlu

OUT IN Weights Unit: kg Theoretical Output Unit: N 25 0.34 0.41 0.44 0.40 0.41 0.12 32 0.58 0.72 0.72 0.70 0.74 0.16 40 0.87 1.08 1.10 1.09 1.13 0.22 50 1.52 1.86 1.98 1.92 1.99 0.34 Size Piston area (mm2) Size Actuation direction INOUT INOUT INOUT INOUT Rod size (mm) 12 14 16 20 Standard Axial foot type Flange type/Front, rear Single clevis Double clevis (with pin) 25 32 40 50 378 650 1056

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Actuator cable: 20 m or less Cooling system Natural air cooling Operating temperature range 0C to 40C (No freezing) Operating humidity range 90% RH or less (No condensation) Storage temperature range 10C to 60C (No freezing) Storage humidity range 90% RH or less (No condensation) Insulation resistance Between all external terminals and the case: 50 MW (500 VDC) Weight 600 g (Screw mounting), 650

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650

Clean Air Module

SF Pressure outlet port assembly 2 LVB3-2 LVB4-2 Without flow adjuster LVB2-3 LVB4-3 ON/OFF valve assembly/ Air operated valve SFD 3 With flow adjuster LVB2-3-1 LVB4-3-1 ON/OFF valve assembly/Manual operation valve LVB2-3-2 LVB4-3-2 LLB LLB Restrictor assembly 4 LVB2-4 LVB4-4 LVB3-65 to 100 L/min With L-type connector With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

FKM Conduit Oil EPDM 7.1 (For orifice diameter 7.1) M12 connector JSX30U Series 1/4, 3/8 7.1 35 1 At the max. operating pressure differential (Fluid: Water) Modular Mounting Type JSXM Series p. 39 Direct Operated Flow rate1 [L/min] Fluid Body material Valve type Seal material Electrical entry Standards 500 1000 Model Port size Orifice diameter [mm] JSXM20 Series 1/8, 1/4 3.2 650 Grommet JSXM30

Multi-Axis Step Motor Controller

Actuator cable: 20 m or less Cooling system Natural air cooling Operating temperature range 0C to 40C (No freezing) Operating humidity range 90% RH or less (No condensation) Storage temperature range 10C to 60C (No freezing) Storage humidity range 90% RH or less (No condensation) Insulation resistance Between all external terminals and the case: 50 MW (500 VDC) Weight 600 g (Screw mounting), 650