Dripping Flow Rate(l/min): 650, Oil Storage Capacity(cm³): 380, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1 1/2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 1 1/2, Accessory: None

Flow Rate: 650 scfm, Port Size: 2", Element Grade: 1 Micron

Flow Rate: 650 scfm, Port Size: 2", Element Grade: 5 Micron

Flow Rate: 650 scfm, Port Size: 2", Element Grade: 0.01 Micron

Flow Rate: 650 scfm, Port Size: 2", Element Grade: Activated Carbon

mlu

OUT IN Weights Unit: kg Theoretical Output Unit: N 25 0.34 0.41 0.44 0.40 0.41 0.12 32 0.58 0.72 0.72 0.70 0.74 0.16 40 0.87 1.08 1.10 1.09 1.13 0.22 50 1.52 1.86 1.98 1.92 1.99 0.34 Size Piston area (mm2) Size Actuation direction INOUT INOUT INOUT INOUT Rod size (mm) 12 14 16 20 Standard Axial foot type Flange type/Front, rear Single clevis Double clevis (with pin) 25 32 40 50 378 650 1056

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Actuator cable: 20 m or less Cooling system Natural air cooling Operating temperature range 0C to 40C (No freezing) Operating humidity range 90% RH or less (No condensation) Storage temperature range 10C to 60C (No freezing) Storage humidity range 90% RH or less (No condensation) Insulation resistance Between all external terminals and the case: 50 MW (500 VDC) Weight 600 g (Screw mounting), 650

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650

Clean Air Module

SF Pressure outlet port assembly 2 LVB3-2 LVB4-2 Without flow adjuster LVB2-3 LVB4-3 ON/OFF valve assembly/ Air operated valve SFD 3 With flow adjuster LVB2-3-1 LVB4-3-1 ON/OFF valve assembly/Manual operation valve LVB2-3-2 LVB4-3-2 LLB LLB Restrictor assembly 4 LVB2-4 LVB4-4 LVB3-65 to 100 L/min With L-type connector With lead wire (3 m) Digital flow switch assembly 5 AD LVB4-650

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

FKM Conduit Oil EPDM 7.1 (For orifice diameter 7.1) M12 connector JSX30U Series 1/4, 3/8 7.1 35 1 At the max. operating pressure differential (Fluid: Water) Modular Mounting Type JSXM Series p. 39 Direct Operated Flow rate1 [L/min] Fluid Body material Valve type Seal material Electrical entry Standards 500 1000 Model Port size Orifice diameter [mm] JSXM20 Series 1/8, 1/4 3.2 650 Grommet JSXM30

Multi-Axis Step Motor Controller

Actuator cable: 20 m or less Cooling system Natural air cooling Operating temperature range 0C to 40C (No freezing) Operating humidity range 90% RH or less (No condensation) Storage temperature range 10C to 60C (No freezing) Storage humidity range 90% RH or less (No condensation) Insulation resistance Between all external terminals and the case: 50 MW (500 VDC) Weight 600 g (Screw mounting), 650

S Couplers

It is possible to achieve a large cost reduction when looking at the effect on a factory scale. 5,000 Conventional couplers Series KK13 Annual cost reduction effect (1,000 yen) S couplers Series KK130 0 Quantity of S couplers used in a factory (pcs.) 500 1,000 1,500 2,000 Air consumption of whole factory (m3/hr (ANR)) 3,600 7,200 10,800 14,400 Compressor capacity of whole factory (kWh) 650

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Kit: Lead wire 50 620 1 to 8 stations S Kit: Serial transmission 35 650 Note 1) One-touch fittings in inch sizes are also available. Note 2) Can be changed to side ported configuration. Note 3) An optional specification for special wiring is available to increase the maximum number of stations.

Series AK1000

3.4 to 6.9 MPa) 1/2 inch connections ) 90 50 0.34 0.62 45 0.31 80 0.55 40 0.28 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 35 0.24 70 0.48 30 0.21 60 25 0.17 0.41 20 0.14 50 0.34 15 0.10 10 0.07 40 0.28 0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650

Large Flow Lubricator AL800/900 Series

Large Flow Lubricator AL800/900 Series Standard Specifications Model AL800 AL900 Individual lubrication Large flow type 4 1 1 2 1 1 2 Port size Air 1.5 MPa 1.0 MPa Fluid Proof pressure Max. operating pressure 1 : 460 1 : 650 4 1 Note) 2 1 1800 Min. operating flow (L/min (ANR)) 380 (Capacity between levels 350) Turbine oil Class 1(With no additives), ISO VG32 5 to 60C (No freezing) Polycarbonate

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

3 1 Fluid Proof pressure Max. operating pressure Air 1.5 MPa LMU 0.7 MPa 1.0 MPa ALIP Operating pressure differential range (Difference between tank pressure and line pressure) (Note 1) 0.1 to 0.6 MPa AEP HEP Vibration resistance (Pressure differential 0.3 MPa) 1 G (9.81 m/sec2) or less 120 : 65 : 100 : 120 190 220 1800 4 1 (Note 2) 4 1 Min. operating flow (L/min (ANR)) 8 3 1 : 460 1 : 650

Exhaust Cleaner Series AMC

How to Order How to Order AMV AMP 20 Standard size Exhaust cleaner for vaccum Thread type Accessory Port size Port size Standard size Option Exhaust cleaner for clean room VEX Model Model AN Port size Max. air flow (l/min (ANR)) Accessory Option 1 4 3 8 1 2 3 4 Port size Max. air flow (l /min (ANR)) Standard size Thread type Standard size 360 650 1,500 3,700 7,500 16,000 2 3 4 3 6 15 37 75

Micro-Mist Separator with Prefilter Series AMH

-~-Micro-Mist Separator '-Made to order s ecifications" J Drain guide 1/48 female thread R IN OUT reversal 250 1/4 T Element service indicator 350 3/8 450 1/2 550 3/4 650 850 11/2 Thread B Bracket C N.C. auto drain(AMH150-550) o N.O. auto drain Rc (plj F GlPFl .. Refer to the table below for combination N NPT of accessories and optional specifications.

Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

76

x F A Specications/Dimensions in (mm) Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight 14.2 (360) 21.3 (540) 15.7 (400) 10.2 (260) 11.8 (300) 0.43 (11) 1.18 (30) 207 lb (94 kg) IDF-TR7000-8 IDF100FS 7 kVA Three-phase Compound winding 220, 240 380, 400, 415 440 V (50/60 Hz) 200 V (50/60 Hz) IDF-TR9000-8 IDF125FS IDF150FS 9 kVA 15.7 (400) 25.6 (650