High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

SY3000-OMH0002

( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM ( 2) 5 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 2)Rc ( ) Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 DC / Best Pneumatics No. 1 1 ()ISO VG32 MSDS 1 1 M5 1/61/4 11.5Nm ) 6 No.SY3000-OMH0002 SY Series 3 3

VFR2000-OMM0001

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

Rotary Table

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth =b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 27 - Kinetic energy Table 9 shows the allowable kinetic energy of the rotary table.

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

EX500-GPR1A.eng

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.

Safety Instructions

Connection thread size NPT , NPT, R NPT, R NPT, R NPT, R Standard torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 Connecting Female Thread: Rc, NPT, NPTF 1 16 1 8 Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 4 3 8 1 2 1 8 1 4 3 8 1 2 30 to 60 30 to 60 15 to 45 15 to 30 5 to 7 11 to 13 14 to 16 20 to 22 Courtesy of Steven Engineering

Air Slide Table Series MXQ

Nil AS AT A BS Note 1) Without adjuster Extension end Retraction end Both ends Extension end Retraction end Both ends Extension end Retraction end Both ends Option combinations Rubber stopper Functional option Adjuster option Nil F R P FR FP Shock absorber BT Note 1) Nil B Note 1) Note 3) Note 3) Note 3) AS, CS CS CT C Metal stopper x x AT, CT x x Note 3) x x A, C x x Note 1) Series MXQ6

High Power Cylinder Series RHC

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3

VFA3000

x 0.8 (Breathing port) 5 x , 14 38 (Piping port) 1769 Series VFA5000 Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing port) 2 x 18 (Pilot port) Max. 2 Max. 2 5 x

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

VFR5000-OMN0001

() C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1~1.5Nm ) ( ) 2 Rc Nm Rc 1/8 7~9 Rc 3/8 22~24 Rc 1/2 28~30 Rc 3/4 28~30 5 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 5m 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ 6 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 3 30

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Series 12-REA Sine rodless cylinder

L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x

CC

Converter nominal size Electrical entry of solenoid valve Through the availability of a wide range of series in terms of converter capacity and valve unit flow rate control capa63 100 160 63mm 100mm 160mm G C D Air operated Grommet Conduit DIN terminal bility, speeds as high as 200mm/s (throttle valve) can be achieved with a 80 cylinder.