3 Port Solenoid Valve/

YZ1-04l-ll-X555 VP744(R)-5 D YZ1-04l-Mll-X555 1/2" [2(A) port] 40 Safety limit switch Made by OMRON 18 Safety limit switch (made by OMRON) Part number: D4N-2B31 (G1/2) : D4N-9B31 (M12 connector) A Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 2 x 1/2" [3(R) port] 6.5 67 2 x 6.2 (For mounting) Applicable cable O.D. 3.5 to 7 G1/

Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Compact Rotary Actuator

Load Rotary actuator Flexible coupling Bearing Fig.5 -22- 4-3 Flange application See table 6 for L dimension of the body. JIS hexagon socket head bolt is neatly placed in the rotary actuator groove. 4-4 Piping and operating direction Table 6 Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 40 28.5 M 8 Fig.6 Fig-7 shows piping ports of the rotary actuator.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5

ZQ-OM01301

: 3 Solid particles Moisture Adhesion of oil Oil Maximum particle count per m3 for particle diameter d(m) Pressure Clas Clas Clas concentration dew s (mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point(oC) 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified

CY1F

Auto Switch Internal Circuits D-A90V Auto Switch Weights Contact protection box CD-P11 CD-P12 OUT () Brown Reed switch (g) D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model OUT () Blue Lead wire length 0.5m 6 6 6 6 8 8 Lead wire length 3m 30 30 30 30 41 41 D-A93V Auto Switch Dimensions LED Brown OUT (+) Brown D-A90, D-A93, D-A96 Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode

HRX-OM-X010

C HRZ008-L1-F 16 14 [HRZ008-L1-F] Cooling capacitykW 12 10 8 6 4 2 0 -20 -10 0 10 20 30 40 Circulating fluid setting temp.deg.

DOC1023126

CDQ2 series) side by side, maintain 40 mm minimum around the motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area. Example 2 When installing electric actuator LEY(G) or LEFEQFEQY series with an auto switch by side, leave a gap of 40 mm or more with respect to the position where the magnet passes.

MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Electric Actuator / Low profile slider type

50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

D-A93 D-M9B D-M9N, D-M9P Type Load voltage Load current range Indicator light Application Reed auto switch Solid state auto switch 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 2.5 to 40 mA 40 mA or less Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors

Thermo-con

9 8 7 6 HEC012-W2l Power connector (AC) DDK CE05-2A18-10PD-D or equivalent Pin No.

2-Color Display Digital Flow Switch Series PFM

8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725, 525 / For 25 (l/min) 30 15 750 (kPa) 300 (kPa) 300 (kPa) Flow rate (l/min)

HRX-OM-M005

5 to 40 Circulating fluid flow setting range*4 L/min 10 to 40 10 to 40 Circulating fluid discharge pressure display range MPa 0 to 1.5 0 to 1.5 Circulating fluid Ethylene glycol solution 60%*5 (No intrusion of foreign body) Refrigerant R404A (HFC) R404A (HFC) Quantity of refrigerant kg 2.9 Pump capacity*6 MPa 0.40 (At 20L/min) 0.40 (At 20L/min) Inverter-driven flow control function applied

HEC_W-E

-5-3 FIG. 5-4 DISPLAY -5-4 FIG. 5-5 RESERVOIR CAP -5-4 FIG. 6-1 COOLING CAPACITY OF HEC006 -6-3 FIG. 6-2 HEATING CAPACITY OF HEC006 -6-3 FIG. 6-3 PUMP CAPACITY OF HEC006 -6-4 FIG. 6-4 PRESSURE LOSS OF HEC006 -6-4 FIG. 6-5 COOLING CAPACITY OF HEC012 -6-5 FIG. 6-6 HEATING CAPACITY OF HEC012 -6-5 FIG. 6-7 PUMP CAPACITY OF HEC012 -6-6 FIG. 6-8 PRESSURE LOSS OF HEC012 -6-6 FIG. 9-1 ALARM INDICATION

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series