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= Pressure (MPa) x Piston area (mm) Optional Parts Rod end nut d JIS class 2 thread 30 D C H B (mm) C d D H B Part no.

RS Q G ND hole H10 RS H A Rod dg RZQ +0.2 0 NX MI W S CEP1 Material: Rolled steel Material: Brass Material: Iron CE1 Applicable bore size A1 L1 L MM Part no. Y-J010B Applicable bore size Applicable bore size B C d H B C d H Part no.

Stations L Dimension VP Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 S070 With mounting adaptor: VV317-02-1-02-A VQ 4-7 mounting hole P = 46 VKF VQZ VZ Manual override (Non-locking) VS DIN terminal facing upward 141.6 VFN Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations

IDF Series 6-1 Specifications 6 1 IDX-OM-W025 Air Dryer 6 References 6-3 Dimentions IDF22E, IDF37E AIR OUTLET PORT SIZE AIR INLET PORT SIZE B A E D G SWITCH WITH LAMP EVAPORATION THERMOMETER DRAFT BALL VALVE AIR OUTLET F VENTILATION VENTILATION C TERMINAL BLOCK DRAIN TUBE (O.D.10) (820) K L P J H N M 413 POWER SUPPLY ENTRY( 17) [OTHER SIDE] measure mm Model Port size A B C D E F G H J

Inch Size H (Hexagon width across flats) Connection thread NPT Effective area (mm2) Weight (g) A L M Applicable tubing O.D.

-D-01 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01

Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 80 Hysteresis (H) 30 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 30 L/min) Switch ON point 80 L/min or more Switch OFF point Below 50 L/min Change the zero cut-off setting. The set value (P) and hysteresis (H) cannot be changed.

Type Symbol sensor Flow rate/temp. 5 Flow rate/temp. 5 L 1 IO-Link/switch output (N/P) None Integrated display type L2 1 IO-Link/switch output (N/P) Switch output (N/P) LT IO-Link/switch output (N/P) With temp. sensor L2T 1 IO-Link/switch output (N/P) Switch output (N/P) (IO-Link compliant 4) 1: Made to Order. 2: External input: resets the accumulated value, peak value and bottom value. 3

Stroke Note 1) 50, 63: L 0 0.008 8-V Effective thread length Y H A B G H B G NN (R) NA Q N F I NA F N CC0.1 NCY3B50, 63 NCY3B6 to 15 (inch) Model Symbol L K J I H G F D A B NN C MM CC N NA P NCY3B6 NCY3B10 NCY3B15 NCY3B20 NCY3B25 NCY3B32 NCY3B40 NCY3B50 NCY3B63 1.38 1.50 2.24 2.60 2.76 3.15 3.62 4.50 5.00 0.19 0.19 0.37 0.31 0.38 0.51 0.56 1.00 1.00 0.16 0.18 0.24 0.24 0.31 0.31 0.39 0.47

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.

Contents CS92-32 CS92-40 CS92-50 CS92-63 CS92-80 CS92-100 CS92-125 CS92-160 32 40 50 63 80 100 125 160 Kits include items 16 to 21 Seal kits consist of items 16 to 21 1.12-5 Series C92 Without Mounting Bracket C92S B-Stroke Bore (mm) WA WB WH ZZ VD AM C D E EE G KK H J K KW M N P S SW B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 33 44 52 64 78 92 110 140 12 16 20 20 25 30 32 40 46 60

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-19 19 Compact Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 How to Order M F 32 50 Y7BW MLGP Number of auto switches Compact guide cylinder with lock Nil S n 2 pcs. 1 pc. n pcs.

Contact pin (preassembled) N 3 Terminal Pin no.

Number of needle rotations Dimensions D3 Applicable tubing O.D. d D1 L3 A L4 M T H (Width across flats) L2 L1 Metric Size/Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L41 A2 M Weight [g] Unlocked Locked Unlocked Locked AS121F-M3-02A-X790 2 11.9 5 AS121F-M3-23A-X790 3.2 7.2 17.2 21.7 5.8 15.8 20.3 16.9 13.3 AS121F-M3-04A-X790 4 8.2 AS121F-M3-06A-X790 6 10.4 18.6 23.1 16.5 6 AS121F-M3-01A-X790

Flow specification when [CFH] I selected by unit selection function Model PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F Rated flow range 0 to 1.05 0 to 2.11 0 to 6.35 -1.05 to 1.05 -2.11 to 2.11 -6.35 to6.35 ft3/h ft3/h ft3/h ft3/h ft3/h ft3/h Setting/display flow range -0.05 to 1.11 -0.10 to 2.22 -0.32 to 6.67 -1.11 to 1.11 -2.22 to 2.22 -6.67 to 6.67 ft3/h ft3/h ft3/h ft3/h ft3/h ft3