Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock

180

20 -X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 703 180 Angular Type Air Gripper Cam Type MHY2 Series 10, 16, 20, 25 How to Order MHY 2

3 Port Solenoid Valve Series SYJ300/500/700

S Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R Lead wire length U 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): SYJ7140-M01 02 DIN terminal (D): SYJ7140-D01 02 M8 connector (W0): SYJ7140-W001 02 L plug connector (L): SYJ7140-L01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 104.2 Max. .10 57.5 [64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) Approx. 300 68.6 [75.6] 20 20 20 20 Pg7 95.1 [97.3]

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Bore size (mm) Y NN P S X ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S

Air Cylinder Series MB

side) 1 15 20 D-P5DWL (n2) 2 (n2) 2 15 + 65 n = 2,4,6,8... 20 + 65 n = 2,4,6,8... n 12

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

A port 1/8 SS3YJ7-20 -05 -A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both

S Couplers Series KK/KK13

Lock 1 S Couplers Series KK Variations Plug (P) Socket (S) Male thread type Male thread type Body size Part no. Body size Port size Part no.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

---M5 SYJ522M---M5 A port M5 x 0.8 Type 20 SS3YJ5--20-05 -Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port 1/8 R port 1/8 Note) For more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Digital Flow Switches

The switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 2. Mount switches in locations where there is no vibration greater than 98m/s2, or impact greater than 490m/s2. 3. Do not use in an area where surges are generated.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table Dimensions: MXP12 1122Z 3 Metal stopper V K Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

PFG3x.eng

Current flow value (Main display) Item (Sub display (left)) Accumuleted value, set value or peak/bottom value (Sub display (right)) Displayed if an internal data error has occurred. Hysteresis 150 L/min Item Default setting System error Panel mount adapter Caution Delay time 0.00 s 3000 L/min Flow range The switch output specification can be selected by pressing or button.

Pressure Relief 3 Port Valve with Locking Holes

Install an air dryer or after cooler on upstream side. Air containing excess drainage may cause malfunction. Caution 3. Install an air filter of 5 m filtration on upstream side. 4. Install a mist separator on upstream side to remove carbon powder from the compressor or other equipment. Excess carbon dust may cause malfunction.