VVX31/32/33

83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

ZPT/ZPX

42 M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

1

/(sbar)] 0.54 1.14 1.14 2.23 2.37 3.50 b 0.36 0.39 0.42 0.38 0.40 0.15 3 Normal Close High Vacuum Solenoid Valve XSA Series Construction/Operation q w r e t y i u OUT IN (Port 1) (Port 2) o Poppet Component Parts No.

CJP

4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22

Peltier-type Chiller Thermo-con/ Compact Type

35C 100 100 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

Vacuum Filter AFJ Series

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size a Mounting Nil Without mounting option Option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large