4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Program How To Order: Manifold (Common SUP/Common EXH) Type 20(5 Port / Body ported type) Applicable solenoid valve: SYJ3 20-M3 SYJ3 23-M3 SS5YJ3--20-05 AB Port M3 0.5 Applicable blank plate ass'y: SYJ3000-21-1A Valve stations 02 2 stations : : P Port M5 0.8 R Port M5 0.8 20 20 stations Type 31(4 Port / Base mounted type) Type 31 Type S31( ) Single solenoid coil is located on same side as

AC Servo Motor Driver (SSCNET /H Type)

tough drive is displayed. 0 to 65535 times 19 Unit power consumption The unit power consumption is displayed. -2147483648 to 2147483647 W 20 Unit total power consumption The unit total power consumption is displayed. -2147483648 to 2147483647 Wh -55- 7.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa Holding force (N) Holding force (N) 0.4MPa 20 20 0.4MPa MHZ2 0.3MPa 0.3MPa MHZJ2 10 10 0.2MPa 0.2MPa MHQ MHL2 0 10 20 30 40 50 0 10 20 30 40 50 L: Holding point length mm Holding point L (mm) Holding point L (mm) MHR MHR2-20/MDHR2-20 MHR2-20/MDHR2-20 MHK Indication of effective holding force The holding force shown in the tables represents the holding force of one finger when all

3 Port Air Operated Valve

-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

CXWM/CXWL

, 25, 32 16, 20 25, 32 Without indicator light Reed switch 10 10, 16 20, 25, 32 16, 20 25, 32 With timer D-F7NTL Grommet (In-line) Solid state switch With pre-wire connector is available for D-F7NTL type, too.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

IIIIIII

F . 2 20 lbs. (1 ks.)

VQ5000

DC (42 mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA)

VQ5000

How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

VDW Series

/30 How to Order Valves (Single Type) VD W 2 1 1 G 2 01 For water, air and vacuum Series Option 1 2 3 10 20 30 None Foot type bracket Nil F Note) Foot brackets are packed with valves.

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

HRX-OM-R028

.5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19 5.8.5 Command:LOC Key-lock setting (W).5-20 5.8.6 Command:STR Saves data (W) .5-21 5.9 Negative response.5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Part Number Description: 80MM CQ2 PART    Product Line: A   Product Line Description: ACTUATOR    Family Code: 515   Family Description: CQ2 COMPACT CYLINDER    Class Code: R1    Click here to report information errorImage shown may not match exact part number

Part Number Description: 40MM CQ2 PART    Product Line: A   Product Line Description: ACTUATOR    Family Code: 515   Family Description: CQ2 COMPACT CYLINDER    Class Code: M1    Click here to report information errorImage shown may not match exact part number

Part Number Description: 100MM CQ2 PART    Product Line: A   Product Line Description: ACTUATOR    Family Code: 515   Family Description: CQ2 COMPACT CYLINDER    Class Code: S1    Click here to report information errorImage shown may not match exact part number