Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Sensor Monitor

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -41No.PS-OMW0014-B [F 5] FUNC terminal setting When the product with analog output/auto shift input function is used, the FUNC terminal setting can

Basic Type/Direct Mount Type

Models suitable in satisfying the requirement of 100 (N) are CY332 or CY340.

Title not found

to 100 Slainlss sleel p6lon rod and rod nut 12 to 100 Adlustable stroke extend 1 2 1 0 1 0 0 Adiustable slroke relracl i 2 1 0 1 0 0 Dualstroke, dua rod '12 to 100 Dual stroke, single rod T2 io 100 NPT Port (1) 32 lo 160 Metal corl scraper 32 lo 100 Wth hont gude bo6s (1J 12 to 100 Hollow piston rod 20 to 100 Inch-size wrench llats 12to 1m (1J Nol avaibble on NCQ2 series. 1.

15

M3E Y m x g From the results above, Find the value M3Emax when Va = 350 mm/s from Graph (11) b. n = 0.72 1, so the cylinder can be used. n = 1 + 2 + 3A + 3B = 0.07 + 0.19 + 0.37 + 0.09 = 0.72 Judgement [Graph 5] Allowable load mass by stroke 25 [Graph 9] Allowable load mass on guides m 400 100 B 10 Load mass m [kg] Load mass m [kg] C CY3B CY3R 100 CY1S25-Z 1 y, Z = 100 CY1S CY1S 0.1 CY1L

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

Electric Actuator / Low profile slider type

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 107.5 100 74 [81] M8

100

Pressure range 100 to 100 kPa 30 inHg to 14 psi Scale range (Angular) 230 3-port solenoid valve SYJ500 series Accuracy 3% F.S.

SMC Pneumatic Clean Series

M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc.

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

Compact Hydraulic Cylinder Series CH
KGB

MA B D-F9BAL A 32 to 100 Proper auto switch mounting positions (mm) D-Z7, D-Z8, D-Y5 D-Y6, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W B 18 21.5 26.5 31 39 46.5 A 13.5 19 19 21.5 24.5 34.5 32 40 50 63 80 100 B A D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) Bore size (mm) D-Y7BAL SMC MA SMC 32 40 50 63 80 100 33 37.5 43.5 52 62.5 75 Approx.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Hv Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch B C A B Hv A B C A B Hv A B Hv A B C D-A9 D-A9V D-M9 D-M9V D-F8 D-M9W A B Hv D-M9WV A 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

240

or less 100 70 30 3 100 15 1 LEC 11.

Compact Cylinder

23 12.5 6 5 to 100 90.5 49.5 21.5 47.5 7 37.5 76.5 3.2 12 68.5 27 13.5 6 5 to 100 99 49.5 26.5 52.5 9 46.5 79.5 3.2 15 86.5 30 15 8 Vertical foot bracket material: Carbon steel Surface treatment: Nickel plated Lateral foot: CQUM Rod end nut B + Stroke L 4 x MD MY MH MT L1 Rod end male thread A + Stroke MS + Stroke X Y X Y MX MZ CQUM20 Lateral Foot (mm) A 42.5 B 21.5 L 39.5 L1 6 MD 15 MH

IZx-OMP0064

mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. load current: 100 mA Residual voltage 1 V or less (Load current at 100 mA) Max. applied voltage: 26.4 VDC Maintenance detection signal Output

Compact Vacuum Unit

Note 2) M-type plug connector is not available with the model with pressure sensor. 13A Table 3 Supply valve/release valve accessories Manual override Note 3) Supply valve/release valve model Accessories ZB1-VQ110UZB1-VQ110U-B ZB1-VQ110LZB1-VQ120UZB1-VQ120U-B ZB1-VQ110ZB1-VQ110-B Nil B Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

: 3.5MPa Series CHQB B 32 to 100 D-A9 D-F9 D-F9W A Approx.