5 Port Solenoid Valve Series VQZ1000/2000/3000

B B B B B B B B B + IN + + +++A IN A NI NI B B O T U O T U 2 4 To CYL port To CYL port P.930 P.931 P.932 P.941 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

Pin Cylinders Series CJP2/CJP

Relay, PLC 24 V Yes Grommet 3-wire (NPN) IC circuit Diagnostic indication (2-color) 5 V, 12 V 3-wire (PNP) 12 V 2-wire A96V A96 IC circuit 5 V 3-wire (NPN equiv.)

PF-OMM0004_C

C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721 30 250 -79No.PF-OMM0004-D / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -80No.PF-OMM0004-D PF3W704/720/740/711 A AA B D E F G H J K L N P PF3W704 3/8 70 50 30 60 40.6 15.2 24

Rotary Actuator/Vane Style Series CRB1

Load voltage Lead wire length (m) No Yes Yes Indicator light Wiring (Output) Auto switch model Type Electrical entry Applicable load DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) Grommet T79 2-wire 12 V Connector Relay, T79C Solid state switch 24 V PLC S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V S7P 3-wire (PNP) Grommet 100 V R73 Relay, Connector R73C Reed switch 2-wire 24 V PLC 100 V or less Grommet

EXxx-OMV0017-D

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Vacuum

cq 2,/7X1-s,2 (For gide mountirE) il[ilil Grovidd as standard) (PV po.t) Air supply pressure port Exterml v*uun pressure port Not6) l&Oirnensions:For mountjng &ackt B !

Vacuum

cq 2,/7X1-s,2 (For gide mountirE) ) il[ilil Grovidd as standard) ) (PV po.t) Air supply pressure port Exterml v*uun pressure port Not6) l&Oirnensions:For mountjng &ackt B !

Hygienic Design Cylinder Series HY

W V Port U U 2 x P (Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5

125

Pilot Solenoid Valve Specifications Internal pilot solenoid / External pilot solenoid Model VEX3121, VEX3221, VEX3321, VEX3421 VEX3122, VEX3222, VEX3322, VEX3422 Pilot valve V114, V115 Symbol Electrical entry Grommet (G), L plug connector (L), M plug connector (M), DIN terminal (D) Rated coil voltage [V] AC (50/60 Hz) 100 V, 110 V, 200 V, 220 V DC 3 V, 5 V, 6 V, 12 V, 24 V Allowable voltage

Digital Flow Switch ( compatible)

0 L/min C D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

tube O.D.: 8 10 12 1 P 1 P B 2 B 2 B 2 B 2 B 2 VQZ The air outlet and external pilot locations for the built-in silencer type are on the B side (both sides) . + + When P/R ports are designated as B, P/R ports on both sides are open.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Sl modula must be orderd separately 17 17 stations Includes 1 staHon to mount Sl unit Port size Symbol P, EA, EB A,B Porting 01T 1!sNPTF Port specifications Symbol Symbol P EA,EB specifications V. NPTF 02T V. NPTF (A,B) 1 Common Common "'2 Side Bottom Bottom porting.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

PF-OMN0011_C

-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C

3

wire (NPN equivalent) 100 V 12 V Relay, PLC 2-wire 24 V A90V No IC circuit 5 V,12 V 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .