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Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points. Set the number of outputs which can be controlled by the wireless master unit. Occupied points for the module output Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points. The module output point includes the number of points of the valve manifold output.

1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5

Table: AND Logic Table I I I I O 1 1 1 1 1 1 1 1 0 0 1 1 0 0 0 1 0 0 0 0 0 0 0 0 0 5.2 The OR Block The Output comes ON when any input is ON. The Output remains OFF only if all the inputs are OFF. Unused Inputs are considered to be Off.

9 and @0 *Seal kit includes piston seal !7, rod seal !8, gasket A !9 and gasket B @0.

1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGQ 5.5(3.5) 10.5

100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 When an actuator is operated under conditions that exceed the lines in the graphs above, be sure to use a regenerative absorption unit.

Bore size (mm) (0/*0* )" $%%& TA TB U 12 16 ("," (23 20 :" & ; , ,9-" %0/50." " ,/"%"*,0" )" " 0/ " 0/*0* )" 9< %"0/ 5 ,/ 0--,/ 0 0." :" & = " "-".,.0"/< "." " %%" <" "5" 0" MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions E E A A (<%9(<%9DB DB " ,>" $%%& " ,>" $%%& ()" ()" !" !" !" !"

to 98 kPa 0 to 0.98 MPa 0 to 101 kPa 100 to 100 kPa 10 to 101.3 kPa 0.1 to 1 MPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 0.1 to 0.45 MPa 0.1 to 0.4 MPa 20 to 101 kPa 101 to 101 kPa 0.1 to 1 MPa 0.4 to 10 MPa 0.5 to 15 MPa 100 to 100 kPa 0.1 to 1 MPa 0 to 1 MPa Voltage 12 to 24 VDC (Ripple 10% or less) 3% F.S. or less (5 to 40C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 3% F.S. or

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

0 0 50 90 100 90 0 20 40 60 80 100 Fluid temperature [oC] Fluid temperature [oC] PF3W711/511 PF3W721/521 1.2 1.6 Operating pressure/ Proof pressure [MPa] 1.4 1.0 Proof pressure [MPa] 1.2 Pressure [MPa] Pressure [MPa] 0.8 1 0.6 0.8 Operating pressure [MPa] 0.6 0.4 0.4 0.2 0.2 3-Color Display Digital Flow Monitor for Water 0 0 0 90 100 80 70 60 50 40 30 20 10 0 90 100 80 70 60 50 40 30 20 10

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value 3 2 1 0 Setting Bit 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 3 Doc.No.DIT-69900-OM005-E Parameter index 0x43 Parameter

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

to 10 V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA EX600-AMB Max. rated input signal 22 mA Note 2) 15 V 250 100 k Input impedance 0.05% F .S.

Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points. Output size (Occupied points for the module output) Set the number of outputs which can be controlled by the Wireless Base unit. Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points. The module output point includes the number of points of the valve manifold output.

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press

flag Temperature unit set status 0= Centigrade (oC) 1= Fahrenheit (oF) 11 Run timer flag Run timer set status 0=Not set 1= Set 12 Stop timer flag Stop timer set status 0= Not set 1=Set 13 Reset after power cut flag Reset after power cut set status 0= Not set 1= Set 14 Anti-freezing flag Anti-freezing set status 0= Not set 1= Set 15 Unused 4.10 Register Map HRS090 Series 4-18 HRX-OM-T004

to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289

2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 46 Non-standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101NB(X10) Scale: 15% 10 6 Work piece mounting reference