•

-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."g',,'-___ : ','(); Pin:t12"",: g= WL idth across fl~tsl 4.7 ./ ClevIS wld!h CK 1A :1 6.s=+P 40 80+ Stroke ZZ+ StJoke 2 CK1B : 195!

Hydraulic Filters

pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Paper 5, 10, 20 (Micromesh) Max. 3.5, 7, 14, 21 MPa Line Filter FH34/44/54/64 Series 3/8, 1/2, 3/4, 1, 1 1/4 1 1/2, 2, 2 1/2, 3 510 Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Paper 5, 10, 20 Micromesh 5, 10, 20 Vertical Return Filter FHBA Series Max

IDX-OM-W035

3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36-104F (2~40) 85% (4) AC115V10% AC230V10% (60Hz) AC460V10% (60Hz) (60Hz

IDX-OM-W032

273 m 3/h 390 m 3/h 660 m 3/h m 3/min (ANR) 1 7 oC 231 m 3/h 347 m 3/h 432 m 3/h 720 m 3/h 10 oC 254 m 3/h 382 m 3/h 510 m 3/h 822 m 3/h 0.7MPa 35 oC 25 oC 230V 50Hz 550 oC 0.15MPa 1.0MPa 24085% AC230V10 50Hz (4) (2) 4.3A 6.1A 7.9A (2) 760W 1390W 1700W (3) 10A 20A R407C(HFC) 42010g 73010g 55010g 67010g R1 R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA

O

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

O

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

ITV-E

Anal ogue out put Vol t age t ype Anal ogue out put Current ( si nk) t ype I TV 0 1 I TV 0 4 O nl y use equi pm ent w i t h a m axi m um l oad i m pedance of 250 . O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

FSQ seies

EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!

Air Cylinder RSQ Series Stopper Cylinder

EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Lead wire Length 600 mm ++ ++ LN: Without lead wire LO: Without connector MO: Without connector + "LN", "MN" types: with 2 sockets. 641 A 3 port solenoid valve 10-V100 Base mounted (with sub-plate) Note) [ ]: AC < >: Large flow type (A) Grommet (G)/(H): 10-V1 4(A)-M5 1 2 G H 13.1 (Light/surge voltage suppressor) 5 + 13 15.5 3 13 3 (For mounting) 2-2.6 28.5 [35.5] <32.4> 10 G: Approx. 300

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Universal Type/Metric Size Applicable tubing O.D. d H D1 (Hexagon width across flats) M L3 A L4 L5 D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max. Min. Max. Min.

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P Rc 1/8 (NPT 1/8) Sensor (breathing) port LQ1 integral fitting 1/8 (3), (4) Rc 1/8 (NPT 1/8) Pilot port Pilot port F K A B A B SMC SMC J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G

lVFl 10

Normally Closed o SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

BP1000

2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

With Factory Installed

~---l---+-+-H 8 0perating pressure is 0.lSMPa{1.Skgf/cm2} or more. 0.15 i;c ,.,:+-t--t..o-t---t--t---"-l--+-H O Orain piping should be .010 tube (inside 0.1 r===t=l===t---H diameter 4mm) and less than Sm in length. 8 Rotate drain cock left direction in manual exhaust for emergency. , ".' " ... ~" O~ 0.2 0.3 OA OS 0.6 0 7 08 0 9 2000 4000 Flow rate /min (ANR) Inlet pressure MPa (Differential

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Normally Closed SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type