VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

Clamp Cylinder with Lock

Round head Phillips screw (M3 tightening torque: 0.5 to 0.7 Nm) Spring washer Mounting bracket part no.

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

SYJ300-OMU0003

SY100-68-A-20 W2WA2500mm W3WA31000mm <2> 300mm W4WA42000mm SYJ312-5LPZ-M3 W7WA75000mm Assy Ass'y SYJ312-5W1ZE-M3 13 No.SYJ300-OMU0003 SYJ Series M8 10COM2 B 12 DCU+COM-COM 1 3 4 L 300mm V100-49-1-1 500mm V100-49-1-2 A B A B A B A B 1000mm V100-49-1-3 A B COM (+)(-) COM (+)(-) 2000mm V100-49-1-4 5000mm V100-49-1-7 (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-)

Digital Flow Switch For Air/Water Series PF2A/PF2W

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without an unit switching function.)

mlu

Auto Switch Mounting Except for D-P5DWL D-P5DWL Auto switch mounting screw Hexagon socket head cap bolt With SW M3 x 0.5 x 5l M3 x 0.5 x 6l Auto switch Switch mounting bracket With SW, M3 x 0.5 x 14l Round head Phillips screw 8 x 3.3 x t0.8 Flat washer Auto switch Auto switch mounting nut Auto switch mounting nut Tightening torque of auto switch mounting screws should be 0.5 to 0.7Nm.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Mounting screw tightening torques 10-SV1000 SV1000-67-1A M2: 0.15 Nm M3: 0.6 Nm M4: 1.4 Nm 10-SV2000 SV2000-67-1A 10-SV3000 SV3000-67-1A 10-SV4000 SV4000-67-1A Plug (White) These are inserted in unused cylinder ports and P, E ports.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 63.5+ST ST 50+ST 8 5.5 16 2 x 3.2 through 15+1/2ST 2.75 19 2 x 6.5 counterbore depth 3.3 14 1 OUT 3 3 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M3 x 0.5 x 12.5 L and M3 x 0.5 (Hexagon bolt) (Hexagon nut) 7 2 x M5 x 0.8 thread depth 4.5 IN (Piping port) 2 x M3 x 0.5 (Through-hole) 2 x M3 x 0.5 (Through-hole) 4 x M5 x 0.8 thread depth

Support Guide/11-LEFG Series

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x

MLU

MLU ML1C DMounting of Auto Switch -X Except D-P5DWL D-P5DWL 20Data Auto switch mounting screw Hexagon socket head cap bolt With SW M3 x 0.5 x 5l M3 x 0.5 x 6l Auto switch Switch mounting bracket With SW, M3 x 0.5 x 14l Round head Phillips screw 8 x 3.3 x t0.8 Flat washer Auto switch Auto switch mounting nut Auto switch mounting nut Tightening torque of auto switch mounting screws should

ITV0000

Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

IDX-OM-O004E

Front L N PE To the users machine Terminal connecting screw: M3 Crimped terminal width: 6.5mm or less Applicable electric wire: 1.25mm2 or more Rubber grommet Power supply cable entry 131 13.

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

Width across flats 3.5 M3 x 0.5 4 9h9 6.4 12.5 6.5 5.5 2.4 5.5 2.4 2.5 Rod end nut part no.: NTJ-006A 4 Series CUJ Dimensions (mm) 8 Double Acting/Single Acting 1in=25.4mm Without magnet/CUJB8 Note) The angular position of the width across flats is not fixed with respect to the tube. 2-M3 x 0.5 (port size) M3 x 0.5 effective depth 6 Element 3 6 3.5 Width across flats 10 Width across flats

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20

Rotary Table Series MSU

x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

S Couplers

Operating pressure at the outlet: 0.5 MPa Air consumption of one line at end: 1.2 m3/min (ANR) Air consumption time: 20% of annual operating time of 2500 hours Compressor efficiency: 0.7 Electric power cost: 15 yen/kWh Compressor capacity: 8 m3/kWh S coupler S coupler 0.5 MPa 1.2 m3/min (ANR) Features 1 Series KK130 Variations Plug (P) Socket (S) Male thread type Male thread type Model Port

Slider Type Ball Screw Drive/11-LEFS Series

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.