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9 @0 @1 @2 #2 Piston rod Rod seal Carbon steel Hard chrome plated P36 @5 @6 @7 @8 @9 P36 P70 P40 P45 P50A P60 Holder plate Piston seal Cast iron Black coating P115 P130 P285 P150 P165 P185 P235 NBR Bushing Valve seal Lead bronze casting P7 P7 P7 P7 P7 P7 P7 Valve guide Tube gasket Brass C120 C135 C155 C175 C195 CS160-1618-G4 CS160-1618-G5 Tie rod Piston seal Carbon steel Chromated G25 G25

7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis. 9 Series ITV0 Electro-pneumatic Regulator Precautions Be sure to read before handling. Piping Handling of One-touch Fittings Caution Caution 1.

MHW2 19 MRHQ 8 25 43 Auto switch 9 Closed E 9 13 13 Open F A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Notes) J dimension is at fully closed position.

9 y u t MDHR3 !4 !3 q !1 @0 @1 w o e i MHZ2 !5 MHZJ2 MHQ r !7 !6 t !0 !8 !2 i !9 y u MHL2 Component Parts Component Parts MHR No. !2 !3 !4 !5 !6 !7 !8 !

VQ VKF 5 VQZ Ozone resistant (Series 80-) VZ VS FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing for use even in ozone environments. 9 VFN 4-13-1 2 Series VKF300 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2.

Skin the cable and crimp the crimped terminal (9) to the edges. 3) Remove the screw with washer (3e) from the bracket (3e). (Loosen in the case of Y shape type terminal.) As shown in the below figure, mount a crimped terminal (9), and then again tighten the screw (3e). Note) Tighten within the tightening torque of 0.5 Nm 15%.

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Model Lead wire length 0.5m (~1 1/2ft) Lead wire length 3m (~9ft) D-Z76 D-Z73 49 (1.7) 9 (0.3) DC (+) Brown [Red] LED 55 (1.9) D-Z76 10 (0.35) (+) 49 (1.7) 9 (0.3) D-Z80 Resistor Reed switch Load DC power supply OUT Black [White] Reverse current prevention diode Dimensions (mm) () 1in = 25.4mm DC () Blue [Black] D-Z73 Switch mounting screw Slotted head set screw (M2.5 x 4l) 30.5 2.3 D-Z80

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC (ripple 10% or less) (With power supply polarity protection) 55 mA or less (Not including the current consumption of the sensor) Same as [Power supply voltage] Power supply current for sensor Note 3) Max. 110 mA (However, the total

10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500 200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30

, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3240-L-M5 M8 connector (W0): SYJ3240-W0-M5 M plug connector (M): SYJ3240-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 98.6[103] 79 [83.4] R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to the page 91 for dimentions with connector cable. 9

2 3 1 Drainage of the facility water circuit . 2 9 2 4 Reinstallation of the product . 2 9 Table of Contents 1 IDX-OM-M051 Air Dryer Table of Contents Chapter 3 Start and stop 3 1 Before Starting . 3 1 3 2 Start . 3 1 3 3 Stop . 3 2 3 4 Precautions for restarting operation . 3 2 3 5 Check items after starting . 3 2 3 6 Display of controller . 3 3 3 7 Signal output. 3 4 Chapter 4 Checks and

L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60

ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

Unit Note 9) Instantaneous flow L/min, cfm (ft3/min) Accumulated flow L, ft3 Displayable range Instantaneous flow 25 to 525 L/min (Displays [0] when value is within 4 to 4 L/min range.) 50 to 1050 L/min (Displays [0] when value is within 9 to 9 L/min range.) 100 to 2100 L/min (Displays [0] when value is within 19 to 19 L/min range.)

9 to @4 to check if the temporarily selected model is compatible with the condition of application. If satisfactory, then the temporarily selected model will be the applicable one.