Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

mlu

A B Easy manual unlocking Locked Unlocked Locking direction can be selected. Extension lock B A W Retraction lock W A B Various mounting brackets to accommodate wide range of applications.

Vacuum Ejector Series ZM

Vacuum 15.5 20 30 1/8 (Rc, NPTF, G) Vacuum port (V) 103 V 8 13 80 1/8 (Rc, NPTF, G) Vacuum port (V) (Side entry style is equipped with plugs.) 998 Series ZM Vacuum Ejector With Valve and Switch Single/With Air Supply Valve (N.O.) and Vacuum Release Valve Basic Type with Valve ZM1 B H M S Supply Pilot pressure exhaust port (PE) ZA A: Release flow rate adjusting needle with lock

IZx-OMR0035

No.: IZ-OMR0035 2) Static neutralization area (Air flow setting: 10, Discharge time from 1000 V to 100 V) IZF21 IZF31 300 mm 300 mm 3) Static neutralization area (Air flow setting: 1, Discharge time from 1000 V to 100 V) IZF21 IZF31 5-2.

PFxx-OMS0001CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Power Valve: Economy Valve Series VEX5

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX592444 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None B Nil Bracket G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

A_HEC-OM-K001

HED003-W2 A B 13 19 HED003-C2A B (Temperature Controller) HED003-HW13 19 (Heat Exchanger) HED005-W2 A B 13 19 HED005-C2A B (Temperature Controller) HED005-HW13 19 (Heat Exchanger) HED007-W2 A B 13 19 HED007-C2A B (Temperature Controller) HED007-HW13 19 (Heat Exchanger) Keep this manual available whenever necessary.

E-P HYREG

IRV 1 to 4 V 67 k 6 0 to 7.5 V 10 k 7 4 to 16 mA 120 8 0 to 15 mA 12 V VEX SRH Body size Port size Rc Option Mounting Symbol Symbol Port 1(P), 2(A) Port 3(R) B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Applicable pilot valve (4) SRP D 00 Without sub-plate M5 M5 SRF B 00 Without sub-plate M5 M5 01 18 ITV 2 00 Without sub-plate 01 18 02 14 Base mounted IC VY1D0-X39 (5) 00 Without

Rotary Actuator Vane Style Series CRB1 Size: 50, 63, 80, 100 How to Order Without CRB1 B S 80 90 W auto switch CDRB1 B S T79 L W 80 90 With auto switch With auto switch Size (With auto switch unit and built-in magnet) Made to Order or Port thread type 50

IC circuit R80 48 V, 100 V Connector R80C 24 V or less Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN 116

25

F .G. + 24 V Brown (2 pcs.) + 24 VDC + + + 24 V Power supply 24 VDC 0 V 0 V 0 V DC/DC Blue (2 pcs.) 0 V F .G.

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

Counter/Extension Cable

Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24-M3 x 0.5 B phase J A B C D A COM COM COM B 12 VDC GND F.G.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

indication) IC circuit 5 V, 12 V 2-wire (No polarity) 3-wire A96 A96V 5V 12 V IC circuit (NPN equivalent) Yes Grommet A72 A72H 200 V 100 V A93V A90V A93 A90 IC circuit Relay, PLC 5 V, 12 V 12 V 2-wire No 100 V or less A73C A80C A79W 24 V Yes Connector IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 24 V or less No Yes Grommet Solid state switches marked with

E-P HYREG ® Series VY1

1 to 5 V 1 24 V 2 3 5 6 7 8 4 to 20 mA 0 to 20 mA 1 to 5 V 0 to 10 V 4 to 20 mA 0 to 20 mA 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note

CHA

Indicator light Lead wire length (m) Applicable load Load voltage Auto switch model Type Electrical entry Wiring (output) Special function 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None Pre-wired AC DC Tie-rod mount Band mount connector M9N 3-wire (NPN) G59 5 V, 12 V IC circuit M9P Grommet 3-wire (PNP) G5P 24 V M9B 12 V 2-wire K59 G39 K39 Reed auto switch Solid state auto switch 5 V, 12 V 12 V 3-wire (

ZP

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not