AR20-B to AR60-B

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

Hand Valve Series VH

VH422-02 to 06 VH432-02 to 06 N Flow direction 2(A) Flow direction 4(B) Flow direction 2(A) Flow direction 4(B) 90 45 45 Rc3/4: 185(10.2) 1 2 9.7 VH6 VH600-06, 10 3 (Closed center) 3/4, 1 Rc1: 194(10.5) 3 4 3.6-6 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R Standard (Opposite to handle side) Handle side Body size (Base size) Port size (nominal size) 2 3 4 6 1/4 base

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Series VQ Metal Seal/Rubber Seal Body Ported

SI unit output No. 0 1 2 3 4 5 6 7 8 9 SI unit output No. 0 1 2 3 4 5 6 7 A B A B B A Void A Void A A B A B B A A A SY Double Double Double Double Double SI unit SI unit Single Single Single Single Single SYJ Stations 1 2 3 4 5 Stations 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link

Modular Type Regulator Series AR

10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60 AR25 to 60 AR25 to 40 Description With bracket With round pressure gauge (with limit indicator) With set nut (for panel mount) Option Note 1) Symbol Nil B G Note 2) Applicable model AR20 to 60 AR20 to 60 AR20 to 40 Description With bracket With round pressure

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

Compact Manifold Regulator

t y u A B N 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

B B B B (4.4) 32 15.3 7.5 17 16 A A A A A 1 (Station n) (Station 1) L1 L2 (Pitch) P = 10.5 4.5 (Light/surge voltage suppressor) 15.5 15.5 (Station n) (Station 1) + + (Light/surge voltage suppressor) A A 20 48.5 [55.5] 15 5 B B + + 16 1.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 33.1 A A 20 15 B B 1 (Pitch) P = 10.5 5 M5 x 0.8 (A, B port) 16.5 L plug

0.4

4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 94.9 76.2 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Dimensions Formula: L1 = 17.5n + 52, L2 = 17.5n + 106 n: Stations (Maximum 16 stations) 16 332 386 412.5 423 15 314.5 368.5 400 410.5 14 297 351 375 385.5 13 279.5 333.5 362.5 373 12 262 316 337.5 348 11 244.5 298.5 325 335.5

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D IN/OUT 2 positions IN Model Dimensions B MADE IN JAPAN -100kpa~0.5MPa PRESS. SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

AS-FG/ASD-FG

(For details, refer to CAT.E501-B "Air Fittings and Tubing" pages 143 through 145.)

60

1/2 VHS50 1 Construction VHS20 to 50-B VHS20 to 50-A . ; . ; Built-in silencer (Option) = = @ @ 2 1 (IN) 2 (OUT) IN OUT B B : : Cross section of EXH port > > 3 (EXH) EXH Option Part No.