V

T NPTF S W I T C H E S Model Standard Supply Pressure Max.

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Maximum Speed: Up to 600 (mm/s) Graph (6) Maximum Speed: Up to 500 (mm/s) 0.3 30 40 50 0.2 20 10 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 0.02 16 20 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100 40 200 Overhang L (mm) Overhang L (mm) Graph (7) Maximum Speed: Up to 800 (mm/s) 30 40 50 20 10 2 3 4 5 Mass W (kg) 40 32 D1 0.5 0.4 0.3 0.2 -X 16 25 20 12 Individual

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Digital Flow Switch ( compatible)

(page 88) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Digital Flow Switch ( compatible)

(page 84) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

SFOD-OMT0005CN

Para protect 12 1+(++) 2(+) Enable SW Enable SW 12 SW 1 2 Unit name Unit name () W-AREA1 W-AREA1 (-) (+) WAREA ON (mm) W 1W 2 WAREA ON *W 1W 2 PARA W 1=W 2=0 WAREA OFF) W-AREA2 W-AREA2 (-) (+) ORG Correct Link Offset () Sensor type Sensor type () Option 1 Option 1 () Undefine No. 11 Undefine No. 11 () Undefine No. 12 Undefine No. 12 () *1 -45- 10.3 () ORIG

Vacuum Ejector Series ZM

(With light: 1.05 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Mass Made to Order (Refer to pages 1004 to 1006 for details.)

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

CLQ

weight kg Load weight kg 80 80 B W 63 63 10 10 50 50 B: Retraction locking F: Extension locking 5 5 40 40 32 32 25 25 1 0.5MPa 0.4MPa 0.5MPa 0.4MPa 1 20 20 0.5 0.5 100 500 100 500 Maximum speed mm/s Maximum speed mm/s 29 Series CLQ Specific Product Precautions 2 Be sure to read before handling.

Table of Contents

500 Maximum speed (mm/s) 2.

CLQ

Component Parts No. q w e r t No. !7 !8 !

Compact

200mm/s 30mm/s 80mm/s Positioning repeatability :tO.05mm i0.03mm Type ot guide Linear guide Operating temperature range s to 4o"C (40-105"F) Pitch (Nm) Statlc moment allowance Boll (Nm) Yaw (Nm) 4 Construction Com 1 0 Stopper B Sensor plate Sofl steel Chrcmated 12 Co!

3M/SMseries

Pilot Solenoid Valve Compact Size/Large Ffow Cv 1.0 2.s Body Ported/Base Mounted Configurations Wide Array of Electrical Entries Low Power Consumption: 1.8 WDC NVF3OOO,5OOO Index 5 Port Pilot Type Solenoid Valve Series NVF Series NVF3OOO I O) Large flow capacity, compact size.

Multi-channel Digital Sensor Monitor ( compatible)

(page 77 to 78) Y U16 0x0190 5 R/W (400) dtH2 (OUT2 delay time at ON) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 6 R/W (0) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtL2 (OUT2 delay time at OFF) Y U16 0x0 7 R/W (0) Setting of digital filter. 0x0 ~ 0x0BB8 (0 ~ 3000) 0.01 s increment 0x070B (1803) 0 R/W FiL (Digital

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

4-channel Flow Monitor ( compatible)

(page 72) Y U16 0x0064 5 R/W (100) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH1 (OUT1 delay time at ON) Y U16 0x0 6 R/W (0) dtL1 (OUT1 delay time at OFF) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 7 R/W (0) OUT1 Accumulated threshold value setting (L) Consider the accumulated inclination when reading or writing

Auto Switch Guide

Main circuit of switch OUT Black Switch operating range (mm) Cylinder speed (mm/s) Switch detecting time Ex.) Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Series VS

Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B 7. Detent assembly SF4-mF-30 SF4-mF-30 8.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion 15 LH B 4 x LD Z Y X W LZ LX 2 x LC (Knock pin position) ZZ + S Stroke LS + Stroke Y X W M (mm) B 54.5 78 LS 54 LX 71 LZ 4 M 10 W 4 LC 7 LD 30 LH 3 LT 16.5 X 8.5 Y Z 63.5 205 ZZ Bore size 40 50 63 5 5 10 12 40 45 91 91 4.5 4.5 17.5 17.5 70.5 75.5 66 82 86 106 5 5 22 22 11 13 242 242 82.5 75.5 Other dimensions are the same as basic type.