How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZL Pilot valve for vacuum release Pilot valve for air supply ZY M5 x 0.8 through (P .E port) ZQ ZF ZP ZCU (Mounting hole) AMJ SUP . port Misc.

45

specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Smooth Cylinder

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

3 Port Air Operated Valve

Base mounted Body ported 2(A) 1/4 3/8 P. 1558 8.9 (P)1 3(R) VPA700 For vacuum N.C.

CE

P-67.5 (YG)

MLGP

P.

MLGP

P.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

Clean Gas Filter

. 299 HAA HAW AT 0.01 m SFA30 140 Filtering efficiency 99.99% ( ) IDF IDU Membrane element ( ) IDF FS Cartridge type Disposable type IDFA SFB10 45 0.99 5 to 80 Replaceable P . 302 Straight type IDFB IDH ID IDG Nominal IDK 120 m 400 SFB20 (Strainer) P . 303 Sintered metallic element ( ) AMG AFF AM Straight type AMD AMH SFB30 P . 306 45 0.99 AME AMF 0.01 m Filtering efficiency 99.99% ( ) ZFC

High Vacuum L Type Valve

90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016 6.

High Vacuum L Type Valve

87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

Soft Start-up Valve

specifications Model With bracket With built-in silence K L M N P Q R S T U V W X Y AVA2000-02--A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AVA3000-03--A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVA4000-04--A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AVA5000-06,10--A 70 75 70 60 11

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

Compact Type

Axial piping available (6, 10) Compact Type Dual-Rod Cylinder Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Port thread type Nil Port position M thread Rc1/8 NPT1/8 G1/8 6 to 25 P Port position 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 1 n M L Bearing type Slide

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

A_HEC-OM-K001

M O D E N o r m a l Function P V < 2 3 . 0 C # 2 S V 2 3 . 0 C M O D E N o r m a l [Tips] No key-in operation for 1 min.