HRX-OM-K003 of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Circulating fluid disposal. 1-15 1.7.2 System disposal . 1-15 1.8 Material Safety Data Sheet (MSDS) . 1-15 Chapter
How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.
M8 Connector Flat Ribbon Cable Manifold Manifold Internal Wiring For more than 10 stations, both poles of the common should be 1. To order connector cable only Cable length(L) Part no. 300mm V100-49-1-1 500mm V100-49-1-2 1000mm V100-49-1-3 2000mm V100-49-1-4 5000mm V100-49-1-7 Flat Ribbon Cable Manifold In the manifold valves, the wiring to the individual valves is wired.
List of Ozone Resistant Products 1: Standard (HNBR) . 9 7. List of Ozone Resistant Non-HNBR Type Products 2: Series 80. 10 Reference Data: Photochemical Oxidants . 11 1.
Standard Specifications AC20-A AC25-A AC30-A AC40-A AC40-06-A Model AF40-06-A AR40-06-A AL40-06-A AF40-A AR40-A AL40-A AF30-A AR30-A AL30-A AF30-A AR25-A AL30-A AF20-A AR20-A AL20-A Air filter Regulator Lubricator Component Port size Pressure gauge port size Fluid 3/4 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 Air 5 to 60C (with no freezing) 1.5 MPa 1.0 MPa 0.05 to 0.7 MPa 5 m Class 1
Specifications FGH200 FGH300 Model FGH100 Number of built-in elements (element length) (mm) 1(125) 1(250) 1(500) Operating pressure MAX. 1 MPa MAX. 80C (Not above the boiling point) Operating temperature Each kind of fluid (See the table of applicable fluids on pages 63 and 64) Applicable fluid Port size (Rc) 3/8, 1/2, 3/4, 1 Housing Stainless steel 316 (Electrolytic polishing) Material Seals
NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.
Screw size: Cross recessed round head screw(M6 1 8 ) Screw color: Black KBE1-06, KBE2-06 KBE2-08, KBE3-08 KBE2-10, KBE3-10 KBE3-12, KBE4-12 87 Series M Miniature Fittings M3, R(PT) 1/8, M5 Hose nipple Barb fitting Tube Accepts nylon, soft nylon and polyurethane tubing. Barb Barb Easy tube insertion. High retaining force. Tube Easy tube insertion. High retaining force.
3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2),
Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature
Series: 25A-PF3W7, Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature
Series: 25A-PF3W7, Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: D (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: None, Actuation Type: A (N.C., Normally Closed), Pilot: Standard (Internal Pilot), Thread: N (NPT)
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 6 (12VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: None, Actuation Type: A (N.C., Normally Closed), Pilot: Standard (Internal Pilot), Thread: N (NPT)
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor), Actuation Type: A (N.C., Normally Closed), Pilot: Standard (Internal Pilot), Thread: Rc, CE Compliant: Q (CE Compliant)
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: None, Actuation Type: B (N.O., Normally Open)
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: L (Indicator Light), Actuation Type: A (N.C., Normally Closed)
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: None, Actuation Type: B (N.O., Normally Open), Pilot: Standard (Internal Pilot), Thread: F (G)
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: L (Indicator Light), Actuation Type: A (N.C., Normally Closed), Pilot: Standard (Internal Pilot), Thread: N (NPT), CE Compliant: Q (CE Compliant)
Body Size: 6 (1), Valve Option: for General, Port Size: 10 [1 (25A)], Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor), Actuation Type: A (N.C., Normally Closed), Pilot: Standard (Internal Pilot), Thread: N (NPT)