MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

E-P HYREG ® Series VY1 1

VY1B0-5 VY120-5 1 V V V 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 V V V 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500

MK

5 !6 !7 !8 !

SI Unit for Vacuum Manifold

0 Fig 5-1.

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

5 6 27.8 29 32 37.5 27 34 37 50 28.5 30.5 33.5 37.5 20H9 28H9 32H9 35H9 35h9 40h9 48h9 54h9 17 19 24 28 20 22 22 24 6.8 8.6 8.6 10.5 11 14 14 18 6.5 8.5 8.5 10.5 12 14 14 19 34.5 46 50 63 60 76 84 100 4.5 6 6.5 10 46h9 61h9 67h9 77h9 4 6 4.5 5 20 27.5 29 38 9.5 12 12 15.5 45h9 60h9 65h9 75h9 8 10 10 12 6.6 7.6 7.6 10 55.4 70.8 75.4 85.4 YC YB YA XC XB XA WF WD WC WB WA UU SU SF SE SD S Q

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

VQ 0 0 5 2 1 Y Flat cable kit with terminal block VV5Q11-08C6G0 ... 1 set Manifold base part number VQ1100-5 ... 4 sets Valve part number (stations 1 to 4) VQ1200-5 ... 1 set Valve part number (station 5) VQ1300-5 ... 3 sets Valve part number (stations 6 to 8) Series Manual override Symbol Manual override Non-locking push type (tool required) Slotted locking type Knob locking

VEX-OMT0003

DIN connector B1B09-2A (Standard) GM209NJ-B17 (CE-compliant) (1) (2) Indicator light assembly (DIN terminal: Yes, Grommet: No) (6) (5) (3) (4) (7) (8) (11) (9) (10) 11 VEX-OMT0003 Replacement Parts List Note 1) For solenoid valve only. Note 2) Refer to SMC catalog for pilot valve part numbers. Refer to page 9 to 11 for the connector part numbers.

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Blue TIUB-09-BU-50-MW 5/16" Polyurethane Tubing 50 ft. - Clear Blue TIUB-09-BU-100-MW 5/16" Polyurethane Tubing 100 ft. - Clear Blue TIUB-11-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue