Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

AIR FILTER

CONSTRUCTION / PARTS LIST 10 8. SPECIFICATIONS OF BOWL ASSEMBLY 11-19 9. REPLACEMENT PROCEDURE 20-27 10. DISASSEMBLY DRAWING 28-29 11. DIMENSIONS 30 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

10 1.

Digital Flow Switch (Remote type sensor unit)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

LEC-OM032xx

LED display.31 9. 1 LED display.31 9. 2 Controller IF communication status and LED display.32 10. Mode.33 10. 1 Outline.33 10. 2 Step data input mode .33 10. 3 Numerical data input mode.33 10. 4 Data writing mode.35 11. Memory map .36 11.1 Memory assignment.36 11.2 Controller IF flagIN Data.40 11.3 Gateway unit status flagIN Data.40 11.4 Gateway unit control flagOUT Data.42 12.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

EXxx-OMU0020CN

(M12 ) (EX245-DX1EX245-DY1) IP65 0.2Nm EX9-AWTS M12 10 . 10-4 (EX9-AWTS) 66 No.EX-OMU0020CN 11. 11.1. . 11-1 . 11-1 Length the EX245 series module n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6 (8 ) mm 67 No.EX-OMU0020CN 12. 12.1.

Speed Controller with One-touch Fittings

57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41 42.1 51.6 52.6 11 9.8 5 6.7 9.8 10.1 12.3 11.5 12.3 15.7 16.1 8.8 2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 6 8.4 9.3 11.6 9.3 11.6 12.8 15.2 13.2 15.2 18.5 20.9 18.5 21.7 12.7 3.3 5.5 9.1 11

Secondary Batteries

with secondary batteries ZS-33-M-X221 90 Material restriction Mounting screw (accessory) Type Integrated display 7 R Rated flow range (Flow rate range) 10 50 11 * ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

10 2 pcs. 15 Operating Range (mm) Bore size Auto switch model 12 16 20 25 32 40 50 63 80 100 D-A9/A9V 7 9.5 9 9 9 9 9 10.5 10 10.5 D-M9/M9V D-M9W/M9WV 4 5.5 5 5 5.5 5 5.5 5.5 6.5 7 D-Z7/Z8 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 11 11 13 13 8.5 9.5 9.5 11 14 5 8.5 9 10 10 6 6 6.5 8.5 11.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

4 Port Solenoid Valve Series VQD1000

) U W M5 x 0.8 U W 633 4 port direct operated poppet solenoid valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 5.5 0.6 0.6 15 5.3 5.3 13 34 33 25.5 29 6 3 L plug connector (L) 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.8 1 (P),

4/5 Port Air Operated Valve SYJA3000 Series

0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2 x 3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11) (0.5) 10 5 5 2 x 1 (Bleed port) 10 10 7 7 2 x 1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust

Manifold Specifications

connector (Station n)(Station 1) VQ7 (mm) EVS 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

MTS

40 200 Overhang L (mm) Overhang L (mm) Graph (7) Maximum Speed: Up to 800 (mm/s) 20 30 40 50 10 2 3 4 5 Weight W (kg) 40 32 1 0.5 0.4 0.3 0.2 16 25 20 12 0.1 50 100 200 5 20 30 40 10 Overhang L (mm) 8-10-6 6 Model Selection Series MTS Horizontal Mounting 8 Maximum speed: Up to 500 mm/s Maximum speed: Up to 300 mm/s Graph (8) Stroke: Up to 10 stroke Graph (11) Stroke: Up to 10 stroke 0.1

1.63

D-M9W 10 2 pcs. D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.